Title:
INFRARED SENSOR AND METHOD FOR MANUFACTURING INFRARED SENSOR
Document Type and Number:
WIPO Patent Application WO/2010/073287
Kind Code:
A1
Abstract:
Provided are an infrared sensor capable of achieving improved detection sensitivity and being easily manufactured in high yield and a method for manufacturing the same. The infrared sensor is provided with a substrate (2), a projecting base material section (3) provided in a projecting manner on the substrate (2) and extending in the direction of incidence of infrared light and an infrared detection section (5) provided on the side surface of at least the upper portion of the projecting base material section (3). The projecting base material section (3) is constituted by assembling plural element base material parts (4) composed of plural rib-shaped vertical base material parts (4a) and plural rib-shaped horizontal base material parts (4b) in a grid pattern.
Inventors:
FUJIMOTO KENJIRO (JP)
MAEDA TAKANORI (JP)
KAWANO TAKAHIRO (JP)
MAEDA TAKANORI (JP)
KAWANO TAKAHIRO (JP)
Application Number:
PCT/JP2008/003886
Publication Date:
July 01, 2010
Filing Date:
December 22, 2008
Export Citation:
Assignee:
PIONEER CORP (JP)
FUJIMOTO KENJIRO (JP)
MAEDA TAKANORI (JP)
KAWANO TAKAHIRO (JP)
FUJIMOTO KENJIRO (JP)
MAEDA TAKANORI (JP)
KAWANO TAKAHIRO (JP)
International Classes:
G01J1/02; H01L27/14; H01L37/02
Foreign References:
| JPH07190854A | 1995-07-28 | |||
| JP2001356046A | 2001-12-26 | |||
| JPH01100426A | 1989-04-18 | |||
| JPH0829262A | 1996-02-02 | |||
| JPS6296536U | 1987-06-19 | |||
| JP2003004527A | 2003-01-08 |
Attorney, Agent or Firm:
OCHIAI, MINORU (JP)
Minoru Ochiai (JP)
Minoru Ochiai (JP)
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