INSPECTION APPARATUS AND INSPECTION METHOD - NAT UNIV CHONBUK IND COOP FOUND

Title:

INSPECTION APPARATUS AND INSPECTION METHOD

Document Type and Number:

WIPO Patent Application WO/2020/032689

Kind Code:

A1

Abstract:

The present inventive concepts relate to an inspection apparatus that snapshots an interference image pattern having a high spatial carrier frequency produced from a one-piece off-axis polarimetric interferometer and that precisely and promptly measures a Stokes vector including spatial polarimetric information. _{The inspection apparatus dynamically measure in real-time a two-dimensional polarization information without employing a two-dimensional scanner.}

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WO/2022/005391	MULTI-CHANNEL INTERFEROMETER-BASED OPTICAL SENSOR
JPH05500562	INDUSTRIAL APPLICABILITY: Methods and apparatus for Fabry-Perot spectroscopic analysis

Inventors:

KIM DAESUK (KR)

Application Number:

PCT/KR2019/010080

Publication Date:

February 13, 2020

Filing Date:

August 09, 2019

Export Citation:

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Assignee:

NAT UNIV CHONBUK IND COOP FOUND (KR)

International Classes:

G01J3/45; G01N21/21; G02B27/28

Foreign References:

US20090213386A1	2009-08-27
US20040012791A1	2004-01-22
US20150041646A1	2015-02-12
US20090309022A1	2009-12-17
JP2012154650A	2012-08-16

Attorney, Agent or Firm:

KORYO IP & LAW (KR)

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