Title:
INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/189675
Kind Code:
A1
Abstract:
Provided is an inspection apparatus for inspecting a device to be inspected. The device to be inspected is a back-illuminated imaging device in which light is incident from the back surface that is the surface on the opposite side to the surface on which a wiring layer is disposed. The inspection apparatus formed on an inspection object includes a mounting table for supporting the inspection object so as to face the back surface of the imaging device. The mounting table has: a top plate which is made of a light-transmitting material and on which the inspection object is placed; a base member which is made of a light-transmitting material and is arranged to face the inspection object with the top plate interposed therebetween and define an exhaust space between the top plate and the base member; and a light emitting mechanism which is arranged to face the inspection object with the top plate and the base member interposed therebetween and emit light toward the inspection object. The top plate is made of porous glass having an average pore size of 30 nm to 10 μm.
Inventors:
KASAI SHIGERU (JP)
AKIYAMA NAOKI (JP)
AKIYAMA NAOKI (JP)
Application Number:
PCT/JP2023/010418
Publication Date:
October 05, 2023
Filing Date:
March 16, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; G01R31/26; H01L21/683; H01L27/144
Domestic Patent References:
| WO2020085203A1 | 2020-04-30 |
Foreign References:
| JP2016009752A | 2016-01-18 | |||
| JP2013121888A | 2013-06-20 | |||
| JP2019012757A | 2019-01-24 | |||
| US20170213796A1 | 2017-07-27 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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