Title:
INSPECTION DEVICE FOR PATTERN DRAWING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/044992
Kind Code:
A1
Abstract:
According to one aspect, the present invention provides an inspection device (MTU) that inspects the correlation state between a rotation angle position of each of reflection surfaces of a rotary polygon mirror (PM) and a scanning position of a spot of light, on the basis of information about a rotation angle position measured by encoder measurement systems (32, 34, 60) and a detection signal output from a sensor unit part (24).
Inventors:
SHIMOYAMA TAKACHIKA (JP)
Application Number:
PCT/JP2021/030564
Publication Date:
March 03, 2022
Filing Date:
August 20, 2021
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/24; G02B26/12
Domestic Patent References:
| WO2018061633A1 | 2018-04-05 |
Foreign References:
| JPS62201412A | 1987-09-05 | |||
| JP2018167564A | 2018-11-01 | |||
| JPH07253379A | 1995-10-03 | |||
| JP2016015305A | 2016-01-28 |
Attorney, Agent or Firm:
CHIBA Yoshihiro et al. (JP)
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