Title:
INSPECTION DEVICE AND TEMPERATURE CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2022/181377
Kind Code:
A1
Abstract:
An inspection device according to an aspect of the present disclosure comprises a stage on which a substrate is placed, a first temperature sensor that measures the surface temperature of the stage and the temperature of the substrate placed on the stage, a second temperature sensor for controlling the temperature of the stage, and a control unit configured to control the temperature of the stage by applying an offset to the control temperature of the second temperature sensor on the basis of the surface temperature of the stage and the temperature of the substrate measured by the first temperature sensor.
Inventors:
NAKAYAMA HIROYUKI (JP)
Application Number:
PCT/JP2022/005730
Publication Date:
September 01, 2022
Filing Date:
February 14, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G05D23/19; G05D23/24; H01L21/02; H01L21/66
Foreign References:
| JP2020198414A | 2020-12-10 | |||
| JP2004502918A | 2004-01-29 | |||
| JP2016180680A | 2016-10-13 | |||
| JP2021009769A | 2021-01-28 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Download PDF: