Title:
INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/199528
Kind Code:
A1
Abstract:
An inspection device comprising: a bombardment source that bombards a pattern of an inspection specimen with an electron beam, said inspection specimen having a first surface, and a second surface on which the pattern is formed; a first voltage application circuit that applies a first voltage to the first surface; and a detector that acquires an inspection image generated from the pattern due to the bombardment, wherein |Vacc–VL|<|V1|, where Vacc is the accelerating voltage of the electrons included in the electron beam, VL is the incident voltage of the electrons arriving at the second surface, and V1 is the first voltage.
Inventors:
OGAWA RIKI (JP)
Application Number:
PCT/JP2020/047723
Publication Date:
October 07, 2021
Filing Date:
December 21, 2020
Export Citation:
Assignee:
NUFLARE TECHNOLOGY INC (JP)
International Classes:
G03F1/86; G01N23/2251; H01J37/20; H01J37/28
Domestic Patent References:
| WO2007086400A1 | 2007-08-02 |
Foreign References:
| JP2009099540A | 2009-05-07 | |||
| JP2007053035A | 2007-03-01 | |||
| JP2012064567A | 2012-03-29 |
Attorney, Agent or Firm:
IKEGAMI, Tetsuma et al. (JP)
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