Title:
INSPECTION SYSTEM, AND METHOD FOR ACQURING IMAGE FOR INSPECTION
Document Type and Number:
WIPO Patent Application WO/2020/121977
Kind Code:
A1
Abstract:
The present disclosure aims to improve inspection efficiency. An inspection system (10) according to the present disclosure comprises an inspection camera (1), a detection camera (2), a stage (3), and an adjustment mechanism (4). The inspection camera (1) comprises a camera having an image-capturing element in which a plurality of photodetectors are arranged two-dimensionally, and the inspection camera (1) captures an image of an area for inspection including at least a portion of subject (100) to be inspected. The detection camera (2) comprises a camera having an image-capturing element in which a plurality of photodetectors arranged two-dimensionally, and the detection camera (2) captures an image of a detection area that includes and is wider than the inspection area. The subject (100) to be inspected is carried by the stage (3). The adjustment mechanism (4) adjusts the relative position between the stage (3) and the inspection camera (1) on the basis of an image of the detection area image-captured by the detection camera (2).
Inventors:
IKUSHIMA KIMIYA
TANAKA TAKASHI
SASAKI KENJI
HANASHIMA MASATO
ICHIKAWA TAKUTO
TANAKA TAKASHI
SASAKI KENJI
HANASHIMA MASATO
ICHIKAWA TAKUTO
Application Number:
PCT/JP2019/047904
Publication Date:
June 18, 2020
Filing Date:
December 06, 2019
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01N21/84; G02B21/36
Foreign References:
| JP2011138096A | 2011-07-14 | |||
| JP2018013737A | 2018-01-25 | |||
| JP2002328094A | 2002-11-15 | |||
| JP2016048195A | 2016-04-07 | |||
| JP2016050864A | 2016-04-11 | |||
| JP2007184589A | 2007-07-19 | |||
| JP2004132918A | 2004-04-30 |
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
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