Title:
INSPECTION SYSTEM, INSPECTION METHOD, INSPECTION DEVICE, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2018/087821
Kind Code:
A1
Abstract:
According to the present invention, an image-capturing means captures an image of an object (61a, 61b, 61c) to be inspected. A measurement means analyzes the image captured by the image-capturing means and thus measures the size of the object to be inspected. An inspection means inspects the object to be inspected according to a difference between the size measured by the measurement means and the predetermined size of the object to be inspected. A processing means executes a process according to the results of the inspection by the inspection means.
Inventors:
SUGAYA SHUNJI (JP)
Application Number:
PCT/JP2016/083166
Publication Date:
May 17, 2018
Filing Date:
November 09, 2016
Export Citation:
Assignee:
OPTIM CORP (JP)
International Classes:
G01N21/84; G01B11/02; G01B11/28
Foreign References:
| JPH0634564A | 1994-02-08 | |||
| JPH1015782A | 1998-01-20 | |||
| JPH03177298A | 1991-08-01 | |||
| JP2014002536A | 2014-01-09 | |||
| JP2000337639A | 2000-12-08 | |||
| JP2012159320A | 2012-08-23 | |||
| JP2000310577A | 2000-11-07 | |||
| JPH07333171A | 1995-12-22 |
Attorney, Agent or Firm:
ASAHI PATENT FIRM (JP)
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