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Title:
INSPECTION SYSTEM AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/037669
Kind Code:
A1
Abstract:
The present invention comprises: a conveyance unit (25) which moves a plurality of subjects (10) in a first direction in water; an imaging unit (30) which images the subjects (10) conveyed by the conveyance unit (25); and a control unit (40) which, on the bases of image data of the subjects (10) imaged by the imaging unit (30), identifies bubbles (B) produced from the subjects (10).

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Inventors:
KODAMA AKIRA (JP)
MATSUMOTO YOJI (JP)
TANAKA TOMOAKI (JP)
SATO NAOYUKI (JP)
Application Number:
PCT/JP2022/021800
Publication Date:
March 16, 2023
Filing Date:
May 27, 2022
Export Citation:
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Assignee:
DAIKIN IND LTD (JP)
International Classes:
G01M3/06
Foreign References:
JPS5094979U1975-08-08
JP2017111077A2017-06-22
JP2021061168A2021-04-15
JP2009019972A2009-01-29
JP2009063596A2009-03-26
JPH11218461A1999-08-10
JP2016080609A2016-05-16
JP2018155682A2018-10-04
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
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