Title:
INSPECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2024/004729
Kind Code:
A1
Abstract:
Provided is an inspection system suppressed from increasing in size. An inspection system (200) comprises: a lighting device (30); and a camera (90). The lighting device (30) has a planar light source (10) and a color filter (20). The color filter (20) is disposed at or near the incident-side focus position (P1) of a first lens (50) with respect to inspection light. The camera (90) has a diaphragm (60) and an image sensor. The inspection light emitted from the planar light source (10) is transmitted through the color filter (20) and a half mirror (40), and enters a first surface (50a) of the first lens (50). Reflected light, which is the inspection light having been reflected on the surface of an article (300), enters the second surface (50b) of the first lens (50), is then reflected on the half mirror (40), passes through the diaphragm (60), and enters the image sensor.
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Inventors:
HARAGUCHI KAZUMA
TANAKA YASUSHI
TAKAHASHI SYOMA
YAMADA KAZUHIRO
TANAKA YASUHIRO
HANEDA TAKUMI
FUJII AKIRA
TANAKA YASUSHI
TAKAHASHI SYOMA
YAMADA KAZUHIRO
TANAKA YASUHIRO
HANEDA TAKUMI
FUJII AKIRA
Application Number:
PCT/JP2023/022544
Publication Date:
January 04, 2024
Filing Date:
June 19, 2023
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01N21/84; G01B11/30; G01N21/88
Foreign References:
| JP2006046946A | 2006-02-16 | |||
| JP2016180621A | 2016-10-13 | |||
| JP2000171403A | 2000-06-23 | |||
| US20200134773A1 | 2020-04-30 |
Attorney, Agent or Firm:
KAMATA Kenji et al. (JP)
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