Title:
INTEGRATED SENSORS
Document Type and Number:
WIPO Patent Application WO2001020302
Kind Code:
A9
Abstract:
A particle detecting device comprising: a light source (100) for forming a diverging light beam (105), a transparent substrate (110) having first surface (112) and second surface (128). A first diffractive optical element (120) and second diffractive optical element (135) are formed on the first surface (112) of the transparent substrate (110), diverging light beam (105) passes through the first diffractive optical element (120) and reflected by the particles formed the second surface (128) of the substrate (110) to the second diffractive optical element (135) and received by a detector (145). A controller receives the signals from the detector (145) and calculates the particle size.
Inventors:
GHARIB MORTEZA (US)
MODARES DARIUS (US)
FOROUHAR SIAMAK (US)
FOURGUETTE DOMINIQUE (US)
TAUGWALDER FREDERIC (US)
WILSON DANIEL W (US)
MODARES DARIUS (US)
FOROUHAR SIAMAK (US)
FOURGUETTE DOMINIQUE (US)
TAUGWALDER FREDERIC (US)
WILSON DANIEL W (US)
Application Number:
PCT/US2000/040919
Publication Date:
August 08, 2002
Filing Date:
September 15, 2000
Export Citation:
Assignee:
CALIFORNIA INST OF TECHN (US)
GHARIB MORTEZA (US)
MODARES DARIUS (US)
FOROUHAR SIAMAK (US)
FOURGUETTE DOMINIQUE (US)
TAUGWALDER FREDERIC (US)
WILSON DANIEL W (US)
GHARIB MORTEZA (US)
MODARES DARIUS (US)
FOROUHAR SIAMAK (US)
FOURGUETTE DOMINIQUE (US)
TAUGWALDER FREDERIC (US)
WILSON DANIEL W (US)
International Classes:
G01N15/02; (IPC1-7): G01N15/02; G01B9/02
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