INTERFERENCE CORRECTION OF ADDITIVES CONCENTRATION MEASUREMENTS IN METAL ELECTROPLATING SOLUTIONS

Title:

INTERFERENCE CORRECTION OF ADDITIVES CONCENTRATION MEASUREMENTS IN METAL ELECTROPLATING SOLUTIONS

Document Type and Number:

WIPO Patent Application WO2003014720

Kind Code:

A9

Abstract:

The present invention relates to a method and apparatus for determining concentrations of various organic additives in metal electroplating solutions, by utilizing a mathematical correction model in combination with the conventional PCGA chrono-potentiometric analysis method, to eliminate the interaction between the observed electrochemical behavior of various organic additives, and to achieve accurate concentration determination of such additives.

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Inventors:

ROBERTSON PETER M

Application Number:

PCT/US2002/025324

Publication Date:

May 06, 2004

Filing Date:

August 09, 2002

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Assignee:

ADVANCED TECH MATERIALS (US)

International Classes:

G01N27/416; G01N27/42; (IPC1-7): G01N27/26

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