ION BALANCE SENSOR

WIPO Patent Application WO/2006/003777

A1

An ion balance sensor capable of detecting an ion balance precisely with a simple configuration thereby to reduce the size and lower the manufacturing cost. The ion balance sensor can detect the ion balance near the surface of an object to be destaticized. The ion balance sensor comprises an antenna (20) to be charged with positive ions or negative ions, and a normally-ON type MOSFET (11) having its gate electrode (G) connected with the antenna (20), its source electrode (S) grounded and connected with an ion balance detecting resistor (R) between itself and the gate electrode (G), and its drain electrode (D) connected with a series connection of a DC power source (V_DS) and a load resistor (R_L) between the source electrode (S) and itself. The voltage of the gate electrode (G) is varied by the voltage drop which is caused by the current to flow between the charged antenna (20) and the earth through the ion balance detecting resistor (R) so that the variation in the drain current by the voltage is detected to detect the positive-negative balance of the ions having charged the antenna (20).

OKANO KAZUO (JP)

PCT/JP2005/010444

January 12, 2006

June 01, 2005

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OKANO KAZUO (JP)

G01N27/60; G01R29/24; H01L29/78; H05F3/04; (IPC1-7): G01N27/60; G01R29/24; H01L29/78; H05F3/04

JPS61160051A	1986-07-19
JP2000046799A	2000-02-18
JP2001013109A	2001-01-19
JP2004063427A	2004-02-26

YOSHIOKA S. ET AL: "Sensitivity and Responses Time of Space Charge Balance Sensor with MOS-FET", DAI 65 KAI EXTENDED ABSTRACTS: THE JAPAN SOCIETY OF APPLIED PHYSICS, no. 1, 1 September 2004 (2004-09-01), pages 156, XP002996670

Morita, Yuichi (New-Kudan Bldg. 7-1, Kandajinbocho 3-chom, Chiyoda-ku Tokyo, JP)

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