Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/007663
Kind Code:
A1
Abstract:
Provided is an irradiation device which can obtain a high washing treatment capability, and can reliably remove organic compounds having a high chemical bond energy. The irradiation device is comprised of an excimer lamp (110) having a discharge container (111) and a pair of electrodes (112, 113), and a plasma discharge electrode (125) which is opposed to the electrode (112) via a dielectric body. A plasma generating circuit is formed via the electrode (112) and the plasma discharge electrode (125). An excimer discharge is generated within the discharge container (111) by a high frequency electric field applied to between the pair of electrodes (112, 113) in the excimer lamp (110), and a plasma discharge is generated by a high frequency electric field applied to between the electrode (112) and the plasma discharge electrode (125) while a reactive gas for generating plasma passes through between the excimer lamp (110) and the plasma discharge electrode (125).

Inventors:
NAKAMURA Masaki (1194 SazuchiBessho-cho,Himeji-sh, Hyogo 24, 〒6710224, JP)
中村 雅規 (〒24 兵庫県姫路市別所町佐土1194番地、ウシオ電機株式会社内 Hyogo, 〒6710224, JP)
Application Number:
JP2010/061002
Publication Date:
January 20, 2011
Filing Date:
June 29, 2010
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
USHIO DENKI KABUSHIKI KAISHA (6-1Ote-machi 2-chome, Chiyoda-ku Tokyo, 50, 〒1008150, JP)
ウシオ電機株式会社 (〒50 東京都千代田区大手町二丁目6番1号 Tokyo, 〒1008150, JP)
NAKAMURA Masaki (1194 SazuchiBessho-cho,Himeji-sh, Hyogo 24, 〒6710224, JP)
International Classes:
H01J65/00; B01J19/08; B08B7/00; H01L21/304; H05H1/24
Attorney, Agent or Firm:
SHICHIJO Koji (Midori Patent Office, Daiichiokana Bldg.6F7-9,Toranomon 2-chome,Minato-k, Tokyo 01, 〒1050001, JP)
Download PDF: