Title:
IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/007663
Kind Code:
A1
Abstract:
Provided is an irradiation device which can obtain a high washing treatment capability, and can reliably remove organic compounds having a high chemical bond energy.
The irradiation device is comprised of an excimer lamp (110) having a discharge container (111) and a pair of electrodes (112, 113), and a plasma discharge electrode (125) which is opposed to the electrode (112) via a dielectric body. A plasma generating circuit is formed via the electrode (112) and the plasma discharge electrode (125). An excimer discharge is generated within the discharge container (111) by a high frequency electric field applied to between the pair of electrodes (112, 113) in the excimer lamp (110), and a plasma discharge is generated by a high frequency electric field applied to between the electrode (112) and the plasma discharge electrode (125) while a reactive gas for generating plasma passes through between the excimer lamp (110) and the plasma discharge electrode (125).
Inventors:
NAKAMURA MASAKI (JP)
OKUMURA HIROSHI (JP)
OKUMURA HIROSHI (JP)
Application Number:
PCT/JP2010/061002
Publication Date:
January 20, 2011
Filing Date:
June 29, 2010
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
NAKAMURA MASAKI (JP)
OKUMURA HIROSHI (JP)
NAKAMURA MASAKI (JP)
OKUMURA HIROSHI (JP)
International Classes:
H01J65/00; B01J19/08; B08B7/00; H01L21/304; H05H1/24
Foreign References:
| JP2002373878A | 2002-12-26 | |||
| JP2005158796A | 2005-06-16 | |||
| JP2001113163A | 2001-04-24 | |||
| JP2009099579A | 2009-05-07 | |||
| JP2000216128A | 2000-08-04 |
Attorney, Agent or Firm:
SHICHIJO Koji (JP)
Koji Shichijo (JP)
Koji Shichijo (JP)
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