PRIORITY APPLICATION

This application claims priority to and benefit of U.S. Patent Application No. 15/445,728, filed February 28, 2017, entitled Isolation Structure for Micro-Transfer Printable Devices, which claims priority to and benefit of U.S. Patent Application No. 62/436,038, filed December 19, 2016, entitled Isolation Structure for Micro-Transfer Printable Devices, the contents of each of which are hereby incorporated by reference in their entirety. FIELD OF THE INVENTION

The present invention relates generally to structures and methods for providing micro- transfer printable integrated circuits on semiconductor substrates using isolation structures.

BACKGROUND OF THE INVENTION

Integrated circuits (ICs) are widely used in electronic devices. Integrated circuits are typically formed on a semiconductor wafer using photolithographic processes and then packaged, for example in a ceramic or plastic package, with pins or bumps on the package providing externally accessible electrical connections to the integrated circuit.

In some applications, the bare integrated circuit dies are not separately packaged but are placed on a destination substrate and electrically connected on the destination substrate, for example using photolithographic or printed-circuit board methods, to form an electronic system. However, this can be difficult to accomplish when the integrated circuits are small. Thus, an efficient method of transferring bare dies from a relatively small and expensive source substrate (e.g., crystalline semiconductor) to a relatively large and inexpensive destination substrate (e.g., amorphous glass or plastic) is very desirable, since the integrated circuits can provide much higher data processing efficiency than thin-film semiconductor structures formed on large substrates.

One approach to handling and placing small integrated circuits (chiplets) uses micro- transfer printing, for example as described in U.S. Patent Nos. 8,722,458, 7,622,367 and 8,506,867, each of which is hereby incorporated by reference in its entirety. In these methods, an integrated circuit is formed on a source wafer, for example a semiconductor wafer, and undercut by etching a gap between a bottom side of the integrated circuit and the wafer. A stamp contacts a top side of the integrated circuit to adhere the integrated circuit to the stamp, the stamp and integrated circuit are transported to a destination substrate, for example a glass or plastic substrate, the integrated circuit is contacted and adhered to the destination substrate, and the stamp removed to "print" the integrated circuit from the source wafer to the destination substrate. Multiple integrated circuits can be "printed" in a common step with a single stamp. The integrated circuits can then be electrically connected using conventional photolithographic and printed-circuit board methods. This technique has the advantage of locating many (e.g., tens of thousands to millions) small integrated circuit devices on a destination substrate in a single print step. For example, U.S. Patent 8,722,458 teaches transferring light-emitting, light-sensing, or light-collecting

semiconductor elements from a wafer substrate to a destination substrate using a patterned elastomer stamp whose spatial pattern matches the location of the semiconductor elements on the wafer substrate.

The micro-transfer printing process requires constructing releasable (micro-transfer printable) integrated circuits on a source substrate. The releasable integrated circuits are typically formed using photolithographic methods and materials. There is a need, therefore, for improvements in processes and structures for making robust releasable integrated circuit in a reliable, efficient, and cost-effective manner.

SUMMARY OF THE INVENTION

In some embodiments of the present invention, a semiconductor structure suitable for micro-transfer printing includes a semiconductor substrate and a patterned insulation layer disposed on or over the semiconductor substrate. The insulation layer pattern defines one or more etch vias in contact with the semiconductor substrate. Each etch via is exposed. A semiconductor device is disposed on the patterned insulation layer and is surrounded by an isolation material in one or more isolation vias that are adjacent to the etch via. The etch via can be at least partially filled with a semiconductor material that is etchable with a common etchant as the semiconductor substrate. In some embodiments, the etch via is empty and the semiconductor substrate is patterned to form a gap that separates at least a part of the semiconductor device from the semiconductor substrate and forms a tether physically connecting the semiconductor device to an anchor portion of the semiconductor substrate or the patterned insulation layer.

In some embodiments, the isolation material and the insulation layer include the same material. In some embodiments, the semiconductor substrate and the semiconductor device include at least some of the same materials. The semiconductor substrate can include a plurality of isolation vias surrounding a corresponding plurality of semiconductor devices with each isolation via adjacent to an etch via. In one configuration, a different etch via is adjacent to each semiconductor device. In another configuration, a common etch via is adjacent to two or more semiconductor devices. In some embodiments, the etch via is surrounded by the patterned insulation layer to form a surrounding anchor structure. In some embodiments, the anchor structure is substantially linear. The etch via can be at least partially filled with a semiconductor material that is etchable with a common etchant that etches the semiconductor substrate. In some embodiments, the etch via can be empty and the semiconductor substrate is patterned to form a gap that separates at least a part of the semiconductor device from the semiconductor substrate and forms a tether physically connecting the semiconductor device to an anchor portion of the semiconductor substrate or the patterned insulation layer.

In various configurations, the semiconductor device is an integrated circuit, is a light- emitting diode, includes a diode, or includes a transistor. The semiconductor device can have at least one of a length and a width less than or equal to 1000 microns, less than or equal to 750 microns, less than or equal to 500 microns, less than or equal to 250 microns, less than or equal to 100 microns, less than or equal to 50 microns, less than or equal to 20 microns, less than or equal to 10 microns, less than or equal to 5 microns, or less than or equal to 2 microns. In some embodiments, the semiconductor device is larger, for example having a size of up to 300 microns by 80 microns or 500 microns by 150 microns, or having at least one of a length and width of 500 microns, 750 microns, or 1,000 microns.

An exemplary method of making a semiconductor structure suitable for micro-transfer printing, according to certain embodiments of the present invention, includes providing a semiconductor substrate having an insulation layer disposed on or over the semiconductor substrate and a base semiconductor layer disposed on or over the insulation layer. The base semiconductor layer and the insulation layer are patterned to expose a portion of the

semiconductor substrate through a corresponding etch via. Semiconductor material is disposed over the base semiconductor layer and in the etch via to form a second semiconductor layer so that the semiconductor material is in contact with the semiconductor substrate (e.g., in the etch via) and the etch via is at least partially filled with the semiconductor material. An isolation via is formed adjacent to the etch via through the semiconductor material and isolation material disposed at least in each isolation via. A semiconductor device is formed or constructed in or on the semiconductor material (including either or both of the first and second semiconductor layers) and is surrounded by isolation material in a direction parallel to the semiconductor substrate. The semiconductor material in the etch via is exposed and the semiconductor material in the etch via and an associated portion of the semiconductor substrate are etched (e.g., in a common step) with a common etchant to undercut the semiconductor device and form a tether attaching the semiconductor device to an anchor disposed on, over, or in the insulation layer or semiconductor substrate, thereby constructing a micro-transfer printable semiconductor device.

The step of processing the semiconductor material to form a semiconductor device can include disposing and patterning one or more dielectric or electrically conductive layers. The etch via can be exposed by patterning one or more of the dielectric or electrically conductive layers or the etch via is exposed by processing the semiconductor layer to form a semiconductor device.

The step of disposing isolation material at least in each isolation via can include a blanket deposition of isolation material that extends on or over the semiconductor material and that is then patterned to expose at least a portion of the semiconductor material.

In some embodiments of the present invention, the semiconductor device is micro- transfer printed from the semiconductor substrate to a destination substrate.

The present invention provides, inter alia, structures and methods for efficiently forming robust releasable integrated circuits for micro-transfer printing in a cost-effective manner.

Furthermore, when compared to other manufacturing methods, certain embodiments of the present invention enable higher resolution tethers that are more easily made because the tether structures are constructed early in the process before the semiconductor devices are formed. The semiconductor devices are also more robust and less prone to process difficulties because the number of process steps performed to make a micro-transfer printable device after the device is constructed is consequently reduced. Furthermore, semiconductor devices made according to methods in accordance with some embodiments of the present invention can be arranged at a higher density on a wafer since multiple etching operations are unnecessary after the

semiconductor devices are constructed, providing a more efficient and cost-effective use of expensive wafers.

In one aspect, the present invention is directed to a method of making a semiconductor structure suitable for micro-transfer printing, comprising: providing a semiconductor substrate having an insulation layer disposed on or over the semiconductor substrate and a base semiconductor layer disposed on or over the insulation layer; patterning the base semiconductor layer and the insulation layer to expose a portion of the semiconductor substrate through a corresponding etch via; disposing semiconductor material over the base semiconductor layer and in the etch via so that the semiconductor material is in contact with the semiconductor substrate and the etch via is at least partially filled with the semiconductor material; forming an isolation via over the insulation layer through the semiconductor material and the base semiconductor layer; disposing isolation material at least in each isolation via; forming a semiconductor device in or on the semiconductor material, at least a portion of the semiconductor device surrounded by the isolation material in a direction parallel to the semiconductor substrate; exposing the

semiconductor material in the etch via; and etching the semiconductor material in the etch via and an associated portion of the semiconductor substrate (e.g., in a common step) to undercut the semiconductor device and form one or more tethers attaching the semiconductor device to an anchor disposed on, over, or in the insulation layer or the semiconductor substrate, thereby constructing a micro-transfer printable semiconductor device.

In certain embodiments, the step of forming the semiconductor device comprises disposing and patterning one or more layers, wherein each of the one or more layers is a dielectric layer or an electrically conductive layer.

In certain embodiments, the step of exposing the etch via is performed by patterning at least one of the one or more layers or wherein the step of exposing the etch via is performed during the step of forming the semiconductor device in or on the semiconductor material.

In certain embodiments, the step of disposing isolation material at least in each isolation via comprises disposing isolation material on or over the semiconductor material (e.g., in a blanket deposition).

In certain embodiments, the method comprises patterning the isolation material to expose at least a portion of the semiconductor material.

In certain embodiments, the method comprises micro-transfer printing the semiconductor device from the semiconductor substrate to a destination substrate.

In certain embodiments, the method comprises patterning the insulation layer in a pattern different from the base semiconductor layer to form at least one of a tether and an anchor. In certain embodiments, the anchor is a portion of the insulation layer or the semiconductor substrate. In another aspect, the present invention is directed to a semiconductor structure suitable for micro-transfer printing, comprising: a semiconductor substrate; a patterned insulation layer disposed on or over the semiconductor substrate, the patterned insulation layer defining one or more etch vias in contact with the semiconductor substrate; and a semiconductor device disposed on the patterned insulation layer, wherein at least a portion of the semiconductor device is surrounded by an isolation material in one or more isolation vias, and the one or more isolation vias are adjacent to at least one of the one or more etch vias.

In certain embodiments, the insulation layer and the isolation material comprise a common material.

In certain embodiments, the semiconductor substrate and the semiconductor material comprise a common material.

In certain embodiments, the semiconductor structure comprises a plurality of isolation vias surrounding a corresponding plurality of semiconductor devices disposed on the patterned insulation layer, wherein each isolation via of the plurality of isolation vias is adjacent to an etch via.

In certain embodiments, the patterned insulation layer defines a corresponding unique etch via for each semiconductor device of the plurality of semiconductor devices such that a portion of the semiconductor substrate under each semiconductor device can be etched by an etchant provided through the corresponding unique via.

In certain embodiments, the patterned insulation layer defines a common etch via corresponding to two or more semiconductor devices of the plurality of semiconductor devices such that a portion of the semiconductor substrate under each of the two or more semiconductor devices can be etched by an etchant provided through the common each via.

In certain embodiments, the one or more etch vias are at least partially filled with a semiconductor material that is etchable with a common etchant as the semiconductor substrate.

In certain embodiments, the etch via is empty, the semiconductor substrate is patterned such that a gap separates at least a part of the semiconductor device from the semiconductor substrate, and one or more tethers physically connect the semiconductor device to an anchor portion of the semiconductor substrate or the patterned insulation layer.

In certain embodiments, (i) the semiconductor device is an integrated circuit, (ii) the semiconductor device is a light-emitting diode, (iii) the semiconductor device comprises a diode, (iv) the semiconductor device comprises a transistor, or any combination of (i), (ii), (iii), and (iv). In certain embodiments, the semiconductor device has at least one of a length and a width less than or equal to 1000 microns (e.g., less than or equal to 750 microns, less than or equal to 500 microns, less than or equal to 250 microns, less than or equal to 100 microns, less than or equal to 50 microns, less than or equal to 20 microns, less than or equal to 10 microns, less than or equal to 5 microns, or less than or equal to 2 microns). In certain embodiments, the

semiconductor device has a thickness less than or equal to fifty microns (e.g., less than or equal to twenty microns, ten microns, five microns, two microns, or one micron).

In certain embodiments, the one or more tethers comprise a buried oxide layer in a silicon on insulator substrate. In certain embodiments, the insulation layer and the isolation material are at least one of a dielectric material, a silicon oxide and a silicon nitride. In certain embodiments, at least one of the semiconductor substrate and the semiconductor material comprises one or more of silicon, silicon <1 1 1>, and silicon <1 0 0>.

In certain embodiments, the one or more etch vias are exposed.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other objects, aspects, features, and advantages of the present disclosure will become more apparent and better understood by referring to the following description taken in conjunction with the accompanying drawings, in which:

Figs. 1A-9B illustrate cross sections (A) and corresponding plan views (B) of successive sequential steps in a method according to illustrative embodiments of the present invention;

Figs. 10A-11B also illustrate cross sections (A) and corresponding plan views (B) of illustrative embodiments of the present invention;

Figs. 12-13 illustrate micro-transfer printing semiconductor devices according to illustrative embodiments of the present invention;

Fig. 14A is a cross section of the plan view of Fig. 14B, illustrating another semiconductor device according to illustrative embodiments of the present invention;

Figs. 15A-22B illustrate cross sections (A) and corresponding plan views (B) of successive sequential steps in another method in accordance with illustrative embodiments of the present invention;

Figs. 23A-25B also illustrate cross sections (A) and corresponding plan views (B) of illustrative embodiments of the present invention; Fig. 26 is a flow chart illustrating methods according to illustrative embodiments of the present invention;

Fig. 27A is a detail photomicrograph of a semiconductor device according to illustrative embodiments of the present invention;

Fig. 27B is a perspective photomicrograph of the semiconductor device of Fig. 27A;

Fig. 27C is a plan view photomicrograph of the semiconductor device of Fig. 27A; and

Fig. 28 is a perspective photomicrograph of a semiconductor device according to illustrative embodiments of the present invention.

The features and advantages of the present disclosure will become more apparent from the detailed description set forth below when taken in conjunction with the drawings, in which like reference characters identify corresponding elements throughout. In the drawings, like reference numbers generally indicate identical, functionally similar, and/or structurally similar elements. The figures are not drawn to scale since the variation in size of various elements in the Figures is too great to permit depiction to scale.

DETAILED DESCRIPTION OF THE INVENTION

Certain embodiments of the present invention provide structures and methods for efficiently forming robust releasable integrated circuits for micro-transfer printing in a cost- effective manner. The integrated circuits are surrounded by an isolation layer that provides environmental and electrical protection to the device. Methods of the present invention provide reduced processing steps to make such robust releasable or released integrated circuits suitable for micro-transfer printing using a stamp. Moreover, embodiments of the present invention provide structures and methods to enable micro-transfer printing from devices formed on alternative substrates or disposed on handle substrates that include materials different from materials in the integrated circuits.

Figs. 1-11 illustrate successive sequential steps and structures for making embodiments of the present invention. Each Figure includes a plan view from the top (B) and a corresponding cross section (A) taken across the cross-section line C of the plan view B.

Referring to Figs. 1-11, A and B, and to the flow chart of Fig. 26, a method of making a semiconductor structure suitable for micro-transfer printing according to some embodiments of the present invention includes providing in step 100 a semiconductor substrate 10 having an insulation layer 20 on, over, or in direct physical contact with the semiconductor substrate 10 and a base semiconductor layer 32 on, over, or in direct physical contact with the insulation layer 20 (as shown in Figs. 1A, IB). The semiconductor substrate 10 can be provided and an insulating layer 20 formed over the semiconductor substrate 10. Similarly, the semiconductor substrate 10 can be provided with an insulating layer 20 formed over the semiconductor substrate 10 and a base semiconductor layer 32 formed over the insulating layer 20. In some embodiments, the semiconductor structure provided in step 100 is a silicon-on-insulator (SOI) wafer. The semiconductor substrate 10 can be, for example, a semiconductor, a silicon semiconductor, silicon <1 0 0>, or silicon <1 1 1>. The base semiconductor layer 32 can be a crystalline, an amorphous, or polycrystalline semiconductor layer (e.g. a silicon layer) and have a thickness less than or equal to twenty microns, less than or equal to ten microns, less than or equal to five microns, one micron, 0.5 microns, 0.3 microns, 0.25 microns, 0.1 microns, or 0.05 microns. The insulation layer 20 can be, for example, a buried oxide (BOx) layer, an oxide layer, a silicon oxide layer, a silicon dioxide layer, a nitride layer, a silicon nitride layer, or a combination of layers having a thickness, for example, of less than or equal to five microns, one micron, 0.5, or 0.25 microns. The insulation layer 20 can be disposed on the semiconductor substrate 10 by, for example, evaporation, sputtering, thermal oxidation, wet thermal oxidation, wafer bonding, or physical bonding. When prepared by wafer bonding, all or part of the insulating layer 20 can be disposed on the layer 32. In some embodiments of the present invention, the base semiconductor layer 32 and the semiconductor substrate 10 can be or include the same material or can be etchable with the same etchant.

If an additional layer is located between the insulation layer 20 and the semiconductor substrate 10 and is etchable with common materials as the semiconductor substrate 10, the additional layer can be considered to be part of the semiconductor substrate 10. If the additional layer is etchable with common materials as the insulation layer 20, the additional layer can be considered to be part of the insulation layer 20. Similarly, if an additional layer is located between the insulation layer 20 and the base semiconductor layer 32 and is etchable with common materials as the insulation layer 20, the additional layer can be considered to be part of the insulation layer 20. If the additional layer is etchable with common materials as the base semiconductor layer 32, the additional layer can be considered to be part of the base

semiconductor layer 32.

Referring next to Figs. 2A and 2B, the base semiconductor layer 32 is patterned in step 105 to expose a portion of the insulation layer 20. The exposed portion of the insulation layer 20 can surround (in a horizontal direction parallel to a surface of the semiconductor substrate 10) portions of the patterned base semiconductor material 32P. The subscript 'P' is added to the base semiconductor layer label 32 to indicate that the patterned base semiconductor layer 32P is patterned.

Referring to Figs. 3A and 3B, the exposed portion of the insulation layer 20 is patterned in step 110 to form etch vias 38 that expose the underlying semiconductor substrate 10. The remaining exposed portion of the insulation layer 20 will form an anchor structure 20A and a tether structure 20T in subsequent process steps. The exposed portion of the semiconductor substrate 10 can surround (in a horizontal direction parallel to a surface of the semiconductor substrate 10) portions of the patterned base semiconductor material 32P except for the tether structure 20T. In such embodiments, the anchor structure 20A is substantially linear. As with the base semiconductor layer 32, the subscript 'P' is added to the insulation layer label 20 to indicate that the patterned insulation layer 20P is patterned. The materials and layers are otherwise unchanged.

Patterning the base semiconductor layer 32 and the insulation layer 20 and those layers described below can be done with conventional photolithographic methods and materials, for example by coating with a photoresist, pattern-wise exposing and developing the photoresist, etching the patterned photoresist, and stripping the photoresist to make a patterned layer. The insulation layer 20 and the base semiconductor layer 32 can be patterned in separate steps with different etchants and can be patterned into the same pattern (as shown in Figs. 16A, 16B discussed below), or different patterns, as shown in Figs. 3A, 3B. For example, an exposed portion of the insulation layer 20 can extend beyond the base semiconductor layer 32P into a portion of the etch via 38. The etch via 38 can be a gap or empty space, as shown in Figs. 3A and 3B or can be filled with an etchable material. The exposed portion of the semiconductor substrate 10 in the etch vias 38 will enable etching of the semiconductor substrate 10 to undercut a constructed semiconductor device.

In step 115 and as shown in Figs. 4A and 4B, a semiconductor material 30 is disposed in a second semiconductor layer 30 on, over, or in contact with the patterned base semiconductor layer 32P, on the exposed patterned insulation layer 20P, and in the etch vias 38 on the exposed portions of the semiconductor substrate 10, for example by CVD, so that the semiconductor material 30 is in contact with the semiconductor substrate 10 in the etch via 38 and the etch via 38 is at least partially filled with the semiconductor material 30. (In Fig. 4B and the plan view Figures following, underlying structures are illustrated with dashed lines to aid in understanding the structure and process.) The second semiconductor layer 30 can be the same material (e.g., silicon) as the patterned base semiconductor layer 32P and the semiconductor substrate 10 and can be etchable with the same etchant. Because the base semiconductor layer 32 can be a crystalline semiconductor, the deposited or epitaxially grown second semiconductor layer 30 can also be a crystalline semiconductor and is not readily physically distinguishable from the patterned base semiconductor layer 32P. Similarly, both of the first and second semiconductor layers 32, 30 could be amorphous or both of the first and second semiconductor layers 32, 30 could be polycrystalline so that the first and second semiconductor layers 32, 30 are not readily distinguishable and can effectively form a single semiconductor layer formed in two separate steps. The layers 32 and 30 can have a wide range of thicknesses, for example less than one micron, 1-10 microns, 10-50 microns, or 50-100 microns, and can have different thicknesses. Nonetheless, in the following figures, the base semiconductor layer 32 and the second semiconductor layer 30 are distinguished with a line and the patterned base semiconductor layer 32P and the patterned second semiconductor layer 30P are distinguished with a line to aid understanding of the process.

In step 120 and as shown in Figs. 5A and 5B, the patterned second semiconductor layer 30 and the base semiconductor layer 32P are further patterned to form isolation vias 36 over the patterned insulation layer 20P. The isolation vias 36 are located on either side of the etch vias 38 (the etch vias 38 are now filled with semiconductor material 30). The isolation vias 36 are adjacent to the etch vias 38 and can be horizontally in contact with the etch vias 38 (as shown) or horizontally offset from them (not shown). By adjacent is meant that no other etch, isolation, or integrated circuit structure is formed or located between the adjacent vias and that the etch via 38 is used to etch and undercut the associated semiconductor substrate 10 beneath and between the isolation vias 36, described below. The isolation vias 36 can surround (in a horizontal direction parallel to a surface of the semiconductor substrate 10) portions of the patterned semiconductor material 30P over the patterned base semiconductor layer 32P, as shown in Fig. 5B. Patterning step 120 can be, for example, a shallow or deep trench isolation step. As the etch vias 38 did in Figs. 3A, 3B, the isolation vias 36 can form a trench, for example a rectangular trench, and separate the surrounded portions of the patterned second semiconductor layer 30P from the material in the etch vias 38.

In step 125 and as shown in Figs. 6A and 6B, an isolation layer 22 of isolation material 22 is disposed, for example by CVD, sputtering, thermal oxidation, or evaporation, at least in each isolation via 36 and can be, for example, a dielectric material such as an oxide, silicon dioxide, a nitride, or silicon nitride, and can be the same material as the insulation layer 20. The isolation material 22 can partially or completely fill the isolation via 36. The isolation material 22 can be, but is not necessarily, disposed in a blanket deposition that extends on or over the patterned second semiconductor layer 30P on a side of the patterned second semiconductor layer 30P opposite the semiconductor substrate 10. To remove any isolation material 22 over the patterned second semiconductor layer 30P, the isolation layer 22 can be patterned in step 130 (including by chemical mechanical polishing) and as shown in Figs. 7A and 7B to form a patterned isolation layer 22P and surround portions of and expose the patterned second semiconductor layer 30P.

Referring to Figs. 8A and 8B and step 135 an integrated circuit structures are formed in the portion of the patterned second semiconductor layer 30P surrounded by the patterned isolation layer 22P using photolithographic process and materials. In step 140 and referring to Figs. 9A and 9B, one or more dielectric and electrically conductive layers 40 (e.g., including any combination of metal or silicon dioxide, patterned conductors, electrodes, or encapsulation layers) can be disposed and patterned on the patterned second semiconductor layer 30P to form a

semiconductor device 34 in step 145 in or on the semiconductor material 30P. The semiconductor device 34 can include both a portion of the patterned second semiconductor layer 30P and the patterned one or more dielectric and metal layers 40P. The patterned second semiconductor layer 30P can also be processed in step 135, for example by implanting or by forming n- or p-doped regions in the patterned second semiconductor layer 30P. As indicated with the dashed arrow in Fig. 26, multiple steps 135 of deposition and 140 of patterning can be used to make the semiconductor device 34 in step 145.

The semiconductor device 34 can be formed in step 135 in crystalline silicon deposited on the patterned base semiconductor layer 32P to provide a high-performance semiconductor device 34, for example operable at fast clock rates and with low power. The portion of the patterned semiconductor material 30P that is processed to form the semiconductor device 34 is illustrated with cross hatching to indicate the completed semiconductor device 34. The patterned semiconductor material 30P portion of the semiconductor device 34 can be surrounded by patterned isolation material 22P in the isolation vias 36 in a direction parallel to the

semiconductor substrate 10 that provides environmental and electrical protection to the patterned semiconductor material 30P portion of the semiconductor device 34. The dielectric and electrically conductive layer 40 can extend above the isolation material 22P so that at least a portion of the semiconductor device 24 is surrounded by the patterned isolation material 22P in one or more isolation vias 36. In combination with the patterned insulation layer 20P (which can be the same material as the isolation layer 22) and the dielectric and metal layers on the top of the patterned semiconductor material 30P, the semiconductor device 34 is protected from the environment and subsequent processing steps, such as etching steps.

As illustrated in Figs. 10A and 10B, the final patterning steps 140 for patterning the electrically conductive and dielectric layer(s) to make the semiconductor device 34 in step 145 can expose the patterned semiconductor material 30P in the etch vias 38 for further processing. If the patterned semiconductor material 30P in the etch vias 38 is not already exposed, patterned semiconductor material 30P in the etch vias 38 is exposed in optional step 150 and as shown in Figs. lOA and 10B.

Referring to Figs. 11A and 11B, the patterned semiconductor material 30P in the etch vias 38 is etched in step 155 to remove the patterned semiconductor material 30P from the etch vias 38 and to form a gap 10G in the semiconductor substrate 10 in a common step that undercuts and separates the semiconductor devices 34 from the semiconductor substrate 10 and exposes and forms a tether 20T physically connecting the semiconductor device 34 to an anchor 20A (e.g., a portion of the patterned insulation layer 20P or semiconductor substrate 10, or both ). In some embodiments, an anchor 20A is disposed on, over, or in the insulation layer 20 or the

semiconductor substrate 10. The semiconductor device 34 can then be micro-transfer printed. The semiconductor substrate 10 can be crystalline and the etch process (step 155) can anisotropically etch the crystalline semiconductor material in preferred crystal orientations and directions of the semiconductor substrate 10 to form the gap 10G, tether 20T, and anchor 20A.

As shown in Figs. 12 and 13, in step 160 the semiconductor device 34 is micro-transfer printed from the semiconductor substrate 10 by pressing stamp pillars 82 of a stamp 80 against the semiconductor devices 34 to break (e.g., fracture) the tethers 20T and adhere the

semiconductor devices 34 to the stamp pillars 82 (as shown in Fig. 12). In some embodiments, tethers 20T are separated or fractured. The stamp 80 is then removed with the adhered semiconductor devices 34 (as shown in Fig. 13) and the semiconductor devices 34 are contacted and adhered to a destination substrate and the stamp 80 removed (not shown). In some embodiments, a micro-transfer printed semiconductor device 34 that is disposed on a destination substrate comprises at least a portion of a fractured tether 20T. As shown in Figs. 10A and 10B, a semiconductor structure 99 suitable for micro-transfer printing includes the semiconductor substrate 10 and the patterned insulation layer 20P disposed on or over the semiconductor substrate 10. The insulation layer pattern defines one or more etch vias 38 in contact with the semiconductor substrate 10. The etch via 38 is exposed and can be empty or filled with a semiconductor material (e.g., patterned semiconductor material 30P) that is etchable with the semiconductor substrate 10 in a common step using a common etchant. A semiconductor device 34 is disposed on the patterned insulation layer 20P, at least a portion of the semiconductor device 34 is surrounded by a patterned isolation material 22P in one or more isolation vias 36 adjacent to the etch via 38. The patterned isolation material 22P can form a protective wall around the semiconductor device 34, for example a rectangular wall. In the exemplary embodiment shown in Figs. 8A and 8B, each etch via 38 is at least partially filled with a semiconductor material that is etchable with a common etchant as the semiconductor substrate 10.

Referring to Figs. 11A and 11B, the etch via 38 is empty and the semiconductor substrate 10 is patterned to form a gap 10G that separates at least a part of the semiconductor device 34 and the semiconductor substrate 10 and forms a tether 20T physically connecting the

semiconductor device 34 to an anchor 20A portion of the semiconductor substrate 10 or the patterned insulation layer 20P. In some embodiments, an anchor 20A is disposed on, over, or in the patterned insulation layer 20P or the semiconductor substrate 10.

In various embodiments of the present invention, the insulation layer 20 and the isolation material 22 are or include the same material, such as dielectric materials, silicon oxide, or silicon nitride. In some embodiments, at least one of the insulation layer 20 and the isolation material 22 comprise at least one of a dielectric material, silicon oxide (e.g., Si0 ₂ ), and silicon nitride. In some embodiments, the semiconductor substrate 10 and the semiconductor material 30 are or include the same material. In some embodiments, at least one of the semiconductor substrate 10 and the semiconductor material comprise one or more of silicon, silicon <1 1 1>, and silicon <1 0 0>.

A plurality of isolation vias 36 can surround a corresponding plurality of semiconductor devices 34, with each isolation via 36 adjacent to an etch via 38. The etch vias 38 can be connected to form an extended area over the semiconductor substrate 10 in contact with patterned isolation material 22P forming walled islands surrounding semiconductor devices 34.

In some embodiments of the present invention, the semiconductor device 34 is an integrated circuit, is a light-emitting diode, includes a diode, or includes a transistor. The semiconductor device 34 can have at least one of a length and a width less than or equal to 200 microns, less than or equal to 100 microns, less than or equal to 50 microns, less than or equal to 20 microns, less than or equal to 10 microns, less than or equal to 5 microns, or less than or equal to 2 microns. The semiconductor device 34 can have a thickness less than or equal to one micron, two microns, five microns, ten microns, twenty microns, or fifty microns.

As shown in Figs. 10A, 10B and 11A, 11B, a separate tether 20T and anchor 20A are formed by separate etch vias 38 in contact with the semiconductor substrate 10 and associated with each individual semiconductor device 34. In some embodiments, an etch via 38 in contact with the semiconductor substrate 10 forms common tethers 20T and anchor 20A areas that are associated with two or more semiconductor devices 34. Referring to Figs. 14A and 14B, an alternative structure is made using the process described in Figs. 1-11, A and B, and Fig. 24, except that the pattern of the exposed insulation layer and the etch vias 38 are as shown, rather than as patterned in Figs. 3A, 3B. This arrangement has the advantage of locating semiconductor devices 34 more closely together since fewer anchor structures 20A are needed.

In a method in accordance with some embodiments of the present invention and referring to Figs. 15-24, cross sections A taken across cross section line C of plan view B, the silicon-on- insulator (SOI) wafer is provided in step 100 as described above with respect to Figs. 1A and IB. The base semiconductor layer 32 and the insulation layer 20 are patterned in steps 105 and 110 as described above to expose a portion of the semiconductor substrate 10 through a corresponding etch via 38 (as shown in Figs. 16A and 16B). The exposed portion of the semiconductor substrate 10 can almost surround a corresponding portion of the patterned first semiconductor layer 32P in a direction parallel to the semiconductor substrate 10 surface. In such embodiments, the base semiconductor layer 32 and the insulation layer 20 have the same pattern in the etch via 38. In step 115, the second semiconductor layer 30 is disposed (as shown in Figs. 17A and 17B and as described with respect to Figs. 4A and 4B above). In step 120 the second semiconductor layer 30 is patterned to form the isolation vias 36 (as shown in Figs. 18A and 18B), as described with respect to Figs. 5A and 5B above, and in the same locations.

In step 125 the isolation layer 22 is deposited in the isolation vias 36 and over the patterned second semiconductor layer 30P (as shown in Figs. 19A and 19B), as described with respect to Figs. 6A and 6B above. In step 130 the isolation layer 22 is patterned to expose the patterned second semiconductor layer 30P (as shown in Figs. 20A and 20B), as described with respect to Figs. 7A and 7B above. In step 135 the patterned second semiconductor layer 30P is processed to form integrated circuits 34 (as shown in Figs. 21A, 21B, 8A, 8B) with any desired additional patterned dielectric or electrically conductive layer 40P in step 140 (as shown in Figs. 22A and 22B), to make the semiconductor device 34 as described with respect to Figs. 9A and 9B above. If necessary, the dielectric or electrically conductive layer 40P is patterned to expose the patterned semiconductor material 30P in the etch vias 38 (step 150, Figs, 23A, 23B as described with respect to Figs. 10A and 10B above). This patterning also exposes the etchable patterned semiconductor material 30P above the tether 20T.

Referring next to Figs. 24A and 24B, in step 155 the patterned semiconductor material 30P is etched from the etch vias 38, along with material from the semiconductor substrate 10 as described above with respect to Figs. 11A and 11B. Tethers 20T are formed in an exposed portion of the patterned insulation layer 20P. The semiconductor devices 34 can then be micro-transfer printed as described with respect to Figs. 12 and 13 above. The etch vias of the Figs. 24A and 24B structure are surrounded by the patterned insulation layer 20P forming a surrounding anchor structure 20A and therefore provides more control of the extent and time required for etching the semiconductor substrate 10 to release the semiconductor device 34.

In some embodiments of the present invention and referring to Figs. 25A, 25B

(corresponding to Figs. 21A 21B and constructed using the same process flow), a structure includes a second isolation via with patterned isolation material 22P around each anchor and a single etch via 38 around each semiconductor device 34 offset from the sides of the integrated circuit 34 and anchor and providing additional isolation. Such exemplary embodiments have been used to construct and micro-transfer print semiconductor devices 34 to a destination substrate.

Fig. 27A is a detail photomicrograph of a micro-transfer-printed semiconductor device 34, a tether 20T, and patterned insulation layer 20P in accordance with some embodiments of the present invention. Fig. 27B is a perspective photomicrograph and Fig. 27C is a plan view photomicrograph of semiconductor structures 99 according to some embodiments of the present invention including the semiconductor device 34 of the detail Fig. 27A. In Figs. 27B and 27C some of the semiconductor devices 34 are micro-transfer printed leaving gaps 10G.

Fig. 28 is a semiconductor structure 99 having a different semiconductor device 34 on a semiconductor substrate 10 and indicating the patterned insulation layer 20P forming the tethers 20T and anchors 20A.

The micro-transfer printable semiconductor devices 34 made by methods in accordance with some embodiments of the present invention can include a variety of semiconductor structures, including a diode, a light-emitting diode (LED), a laser, a laser diode, a photo-diode, a photo-transistor, a transistor, an integrated circuit, a digital circuit, or a CMOS integrated circuit.

In some embodiments of the present invention, the micro-transfer printable

semiconductor devices 34 have a length greater than width, for example having an aspect ratio greater than or equal to 1.5, 2, 4, 8, 10, 20, or 50, and electrical contacts that are adjacent to the ends of the semiconductor devices 34 along the length of the micro-transfer printable semiconductor devices 34. The semiconductor devices 34 can have a variety of different sizes. For example, the semiconductor devices 34 can have at least one of a width from 0.5 to 2 μιη, 2 to 5 μιη, 5 to 10 μιη, 10 to 20 μιη, or 20 to 50 μιη, a length from 2 to 5 μιη, 5 to 10 μιη, 10 to 20 μιη, or 20 to 50 μηη, 50 to 100 μηη, or 100 to 250 μηη, and a thickness from 0.5 to 1 μηη, 1 to 2 μηη, 2 to 5 μηη, 4 to 10 μηη, 10 to 20 μηη, or 20 to 50 μηη.

Methods of forming micro-transfer printable structures are described, for example, in the paper "AMOLED Displays using Transfer-Printed Integrated Circuits" (Journal of the Society for Information Display, 2011, DOI # 10.1889/JSID19.4.335, 1071-0922/11/1904-0335, pages 335-341) and U.S. Patent 8,889,485, referenced above. For a discussion of micro-transfer printing techniques see, U.S. Patent Nos. 8,722,458, 7,622,367 and 8,506,867, each of which is hereby incorporated by reference in its entirety. Micro-transfer printing using compound micro-assembly structures and methods can also be used with the present invention, for example, as described in U.S. Patent Application Serial No. 14/822,868, filed August 10, 2015, entitled Compound Micro- Assembly Strategies and Devices, which is hereby incorporated by reference in its entirety.

Additional details useful in understanding and performing aspects of the present invention are described in U.S. Patent Application Serial No. 14/743,981, filed June 18, 2015, entitled Micro Assembled LED Displays and Lighting Elements, which is hereby incorporated by reference in its entirety.

As is understood by those skilled in the art, the terms "over" and "under" are relative terms and can be interchanged in reference to different orientations of the layers, elements, and substrates included in the present invention. For example, a first layer on a second layer, in some implementations means a first layer directly on and in contact with a second layer. In other implementations, a first layer on a second layer includes a first layer and a second layer with another layer therebetween.

Having described certain implementations of embodiments, it will now become apparent to one of skill in the art that other implementations incorporating the concepts of the disclosure may be used. Therefore, the disclosure should not be limited to certain implementations, but rather should be limited only by the spirit and scope of the following claims.

The various described embodiments of the invention may be used in conjunction with one or more other embodiments unless technically incompatible.

Throughout the description, where apparatus and systems are described as having, including, or comprising specific components, or where processes and methods are described as having, including, or comprising specific steps, it is contemplated that, additionally, there are apparatus, and systems of the disclosed technology that consist essentially of, or consist of, the recited components, and that there are processes and methods according to the disclosed technology that consist essentially of, or consist of, the recited processing steps.

It should be understood that the order of steps or order for performing certain action is immaterial so long as the disclosed technology remains operable. Moreover, two or more steps or actions in some circumstances can be conducted simultaneously. The invention has been described in detail with particular reference to certain embodiments thereof, but it will be understood that variations and modifications can be effected within the spirit and scope of the invention.

PARTS LIST

C cross section line

10 semiconductor substrate

10G gap

20 insulation layer

20A anchor

20P patterned insulation layer 20T tether

22 isolation material / layer

22P patterned isolation material / layer

30 semiconductor material / second semiconductor layer

30P patterned semiconductor material / patterned second semiconductor layer

32 base semiconductor layer

32P patterned base semiconductor layer / patterned first semiconductor layer

34 semiconductor device

36 isolation via

38 etch via

40 metal and dielectric layer(s)

40P patterned metal and dielectric layer(s)

80 stamp

82 stamp pillar

99 semiconductor structure

100 provide semiconductor substrate step

105 pattern seed layer step

110 pattern insulation layer step

115 dispose semiconductor layer step

120 pattern semiconductor layer step

125 dispose isolation layer step

130 pattern isolation layer step

135 form integrated circuitry step

140 pattern metal and dielectric layer(s) step

145 form semiconductor device step

150 expose etch via step

155 etch semiconductor layer and substrate step

160 micro-transfer print semiconductor device step