Title:
LAMINATE STRUCTURE AND METHOD FOR MANUFACTURING SAME, AND SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/012916
Kind Code:
A1
Abstract:
[Problem] The present invention addresses the problem of providing a laminate structure in which the atomic arrangement is highly stable, a method for manufacturing the laminate structure, and a semiconductor device in which the laminate structure is used. [Solution] This laminate structure is characterized in having an alloy layer A formed with germanium and tellurium being the main components, and an alloy layer B formed with tellurium and either antimony or bismuth being the main components, chalcogen atoms of sulfur and/or selenium being contained in the alloy layer A and/or the alloy layer B.
Inventors:
TOMINAGA JUNJI (JP)
MIYATA NORIYUKI (JP)
KAMATA YOSHIKI (JP)
KUNISHIMA IWAO (JP)
MIYATA NORIYUKI (JP)
KAMATA YOSHIKI (JP)
KUNISHIMA IWAO (JP)
Application Number:
PCT/JP2019/024679
Publication Date:
January 16, 2020
Filing Date:
June 21, 2019
Export Citation:
Assignee:
AIST (JP)
TOSHIBA KK (JP)
TOSHIBA KK (JP)
International Classes:
H01L21/8239; C01B19/04; H01L27/105; H01L45/00
Domestic Patent References:
| WO2016147802A1 | 2016-09-22 | |||
| WO2016147802A1 | 2016-09-22 |
Foreign References:
| JP2017143153A | 2017-08-17 | |||
| JP2016111219A | 2016-06-20 | |||
| JP2010287744A | 2010-12-24 | |||
| JP2013051245A | 2013-03-14 | |||
| JP4621897B2 | 2011-01-26 | |||
| JP4599598B2 | 2010-12-15 | |||
| JPS5750791B1 | 1982-10-28 | |||
| JPS6124320B2 | 1986-06-10 | |||
| JPS6238495B2 | 1987-08-18 |
Other References:
S. RAOUXM. WUTTIG: "Phase Change Materials", 2009, SPRINGER VERLAG
M. WUTTIGN. YAMADA, NATURE MATER, vol. 6, 2007, pages 824 - 832
R. SIMPSONP. FONSA. V. KOLOBOVT. FUKAYAM. KRBALT. YAGIJ. TOMINAGA, NATURE NANOTECHNOL, vol. 6, 2011, pages 501
J. TOMINAGAA. V. KOLOBOVP. FONST. NAKANOS. MURAKAMI, ADV. MATER. INTERFACES, 2013
J. TOMINAGAA. V. KOLOBOVP. J. FONSX. WANGY. SAITOT. NAKANOM. HASES. MURAKAMIJ. HERFORTY. TAKAGAKI, SCI. TECHNOL. ADV. MATER., vol. 16, 2015, pages 014402
H. NAKAMURAI. RUGGERS. SANVITON. INOUEJ. TOMINAGAY. ASAI, NANOSCALE, vol. 9, 2017, pages 9386 - 9395
RUINING WANGVALERIA BRAGAGLIAJOS E. BOSCHKERRAFFAELLA CALARCO, CRYST. GROWTH, vol. 16, 2016, pages 3596 - 3601
ANDRIY LOTNYKISOM HILMIULRICH ROSSBERND RAUSCHENBACH, NANO RESEARCH, vol. 11, 2018, pages 1676 - 1686
LUO, Y. R.: "Comprehensive Handbook of Chemical Bond Energies", 2007, CRC PRESS
See also references of EP 3796372A4
M. WUTTIGN. YAMADA, NATURE MATER, vol. 6, 2007, pages 824 - 832
R. SIMPSONP. FONSA. V. KOLOBOVT. FUKAYAM. KRBALT. YAGIJ. TOMINAGA, NATURE NANOTECHNOL, vol. 6, 2011, pages 501
J. TOMINAGAA. V. KOLOBOVP. FONST. NAKANOS. MURAKAMI, ADV. MATER. INTERFACES, 2013
J. TOMINAGAA. V. KOLOBOVP. J. FONSX. WANGY. SAITOT. NAKANOM. HASES. MURAKAMIJ. HERFORTY. TAKAGAKI, SCI. TECHNOL. ADV. MATER., vol. 16, 2015, pages 014402
H. NAKAMURAI. RUGGERS. SANVITON. INOUEJ. TOMINAGAY. ASAI, NANOSCALE, vol. 9, 2017, pages 9386 - 9395
RUINING WANGVALERIA BRAGAGLIAJOS E. BOSCHKERRAFFAELLA CALARCO, CRYST. GROWTH, vol. 16, 2016, pages 3596 - 3601
ANDRIY LOTNYKISOM HILMIULRICH ROSSBERND RAUSCHENBACH, NANO RESEARCH, vol. 11, 2018, pages 1676 - 1686
LUO, Y. R.: "Comprehensive Handbook of Chemical Bond Energies", 2007, CRC PRESS
See also references of EP 3796372A4
Attorney, Agent or Firm:
SHIODA Shin (JP)
Download PDF: