LAMINATED STRUCTURE AND METHOD FOR PRODUCING SAME

WIPO Patent Application WO/2022/168800

A1

[Problem] The present invention addresses the problem of providing a method with which it is possible to form a functional thin film on a substrate through excellent epitaxial growth and to improve characteristics such as the piezoelectric properties of the functional thin film, and a laminated structure having such exceptional characteristics. [Solution] A laminated structure including a substrate and an intermediate film formed on the substrate, wherein the intermediate film includes a metal oxide having Hf as an essential element and has a columnar or plate-form crystal structure, and the intermediate film satisfies at least (1) or (2): (1) the metal oxide includes, in addition to Hf, one or more additional metal elements selected from group 4 elements; and (2) the intermediate film furthermore includes an oxide of an amphoteric element and/or a rare earth element.

WO/2009/038532	METHOD OF PRODUCING A LAYER BY ARC-EVAPORATION FROM CERAMIC CATHODES
WO/2014/044712	PROCESS FOR THE PRODUCTION OF AN OPTICALLY SELECTIVE COATING OF A SUBSTRATE FOR HIGH TEMPERATURE RECEIVER SOLAR DEVICES AND RELATIVE MATERIAL OBTAINED
JPH07117603	[Title of the Invention] Antireflection film of Faraday rotator

KIJIMA TAKESHI (JP)
TABATA HITOSHI (JP)
YAMAHARA HIROYASU (JP)

PCT/JP2022/003620

August 11, 2022

January 31, 2022

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UNIV TOKYO (JP)

C23C14/06; C30B23/02; C23C14/08; C30B25/02; C30B29/22; H01L41/187

WO2020179210A1

2020-09-10

US6258459B1	2001-07-10
JPH10223476A	1998-08-21
JP2001152324A	2001-06-05
JP2010086796A	2010-04-15
JP2005294452A	2005-10-20
JPH05186298A	1993-07-27
JP2004304143A	2004-10-28

ONO Makoto et al. (JP)

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