Title:
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2017/158694
Kind Code:
A1
Abstract:
A laser apparatus according to an aspect of the present disclosure is provided with: a master oscillator that outputs a laser beam; a plurality of amplifiers that includes carbon dioxide as a laser medium and amplifies the laser beam; an optical path pipe that covers a laser beam optical path between the amplifiers; a gas supply port for supplying a gas having a lower carbon dioxide concentration than air in the optical path pipe; a carbon dioxide concentration meter that measures the carbon dioxide concentration in the optical path pipe; and a warning device that outputs a warning when the carbon dioxide concentration measured by the carbon dioxide concentration meter exceeds a prescribed value.
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Inventors:
KUROSAWA YOSHIAKI (JP)
SUGANUMA TAKASHI (JP)
SUGANUMA TAKASHI (JP)
Application Number:
PCT/JP2016/058011
Publication Date:
September 21, 2017
Filing Date:
March 14, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/00; H01S3/036; H01S3/134
Foreign References:
| JP2013513929A | 2013-04-22 | |||
| JP2008034871A | 2008-02-14 | |||
| JPH118426A | 1999-01-12 | |||
| JP2014170885A | 2014-09-18 | |||
| JPH02142558U | 1990-12-04 | |||
| JPH09405U | 1997-07-15 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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