Title:
POINT SPREAD FUNCTION MEASUREMENT DEVICE AND MEASUREMENT METHOD, IMAGE ACQUISITION DEVICE AND IMAGE ACQUISITION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/158695
Kind Code:
A1
Abstract:
With the purpose of acquiring a point spread function without applying a process to a sample, the point spread function measurement device (25) according to the present invention is equipped with a scanning unit (4) that scans two illuminating light beams (L1, L2) emitted from a light source (2), an illuminating optical system (3) that shines the two illuminating light beams (L1, L2) scanned by the scanning unit (4) onto a sample (X), a relative position adjusting unit (19) that modifies the relative positions at which the two illuminating light beams (L1, L2) emitted from the illuminating optical system (3) are shone onto the sample (X), a detection optical system (5) that detects signal light generated at a position at which the illuminating light beams (L1, L2) emitted from the illuminating optical system (3) overlap on the sample (X), and a calculation unit that calculates a point spread function on the basis of the relative positions on which are shone the signal light detected by the detection optical system (5) and the two illuminating light beams (L1, L2) when signal light is detected.
Inventors:
DOI ATSUSHI (JP)
Application Number:
PCT/JP2016/058012
Publication Date:
September 21, 2017
Filing Date:
March 14, 2016
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
G02B21/00; G01N21/64
Foreign References:
| JP2015007809A | 2015-01-15 | |||
| JP2016015315A | 2016-01-28 | |||
| JP2015155970A | 2015-08-27 |
Attorney, Agent or Firm:
UEDA, Kunio et al. (JP)
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