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Title:
LASER PROCESSING DEVICE, LASER PROCESSING SYSTEM, AND LASER PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/198513
Kind Code:
A1
Abstract:
A laser processing device provided with: a height measurement unit which measures the vertical direction position of an irradiating point of a processing laser light beam on an upper surface of a substrate; and a control unit which, while causing the irradiating point to be moved over a plurality of division planned lines on the upper surface of the substrate, controls the vertical direction position of a light focusing unit on the basis of the vertical direction position of the irradiating point. The height measurement unit includes a measuring laser oscillation unit which oscillates a measuring laser light beam having a wavelength different from that of the processing laser light beam, and a reflected light receiving unit which receives reflected light of the measuring laser light beam with which the upper surface of the substrate has been irradiated via the same path as that of the processing laser light beam midway therethrough. The control unit, while one of said substrate is being processed by means of the processing laser light beam, modifies the output of the measuring laser oscillation unit on the basis of the intensity of the reflected light received by the reflected light receiving unit.

Inventors:
MORI, Hirotoshi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
KAWAGUCHI, Yoshihiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
TANOUE, Hayato (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
HISANO, Kazuya (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
Application Number:
JP2019/013293
Publication Date:
October 17, 2019
Filing Date:
March 27, 2019
Export Citation:
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Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
International Classes:
H01L21/301; B23K26/03; B23K26/364; B23K26/53; G01B11/00
Domestic Patent References:
WO2004105110A12004-12-02
Foreign References:
JP2016139726A2016-08-04
JP2008119715A2008-05-29
JP2008119716A2008-05-29
JP2009297773A2009-12-24
JP2006278624A2006-10-12
JP2013021056A2013-01-31
Attorney, Agent or Firm:
ITOH, Tadashige et al. (16th Floor, Marunouchi MY PLAZA 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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