Title:
LASER REPAIR DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/119779
Kind Code:
A1
Abstract:
A laser repair device (1) carries out repair processing by irradiating a specific film on a substrate, on which plural layers of films of different types are formed, with laser light and is provided with: a laser light source (3) that outputs a prescribed oscillation wavelength λs; a wavelength conversion unit (4) that converts the wavelength of the laser light output by the laser light source (3) to a specific wavelength λt with the highest absorption for the specific film; and a transmission optical system (5) that transmits the laser light output by the wavelength conversion unit (4) by a set optical path. The transmission optical system (5) includes wavelength selective optical elements (5A, 5B, 5D) that transmit the laser light of the specific wavelength λt selectively to the set optical path, and repair processing is carried out selectively only on the specific film by suppressing adverse effects on lower layers in a processing target wherein different types of films are laminated on a substrate by outputting laser light with a high purity of the specific wavelength λt.
More Like This:
Inventors:
SAKAINO TETSUO (JP)
TOMURA DAISUKE (JP)
TOMURA DAISUKE (JP)
Application Number:
PCT/JP2014/052419
Publication Date:
August 07, 2014
Filing Date:
February 03, 2014
Export Citation:
Assignee:
V TECHNOLOGY CO LTD (JP)
International Classes:
B23K26/064; B23K26/40; G02F1/13; G09F9/00
Foreign References:
| JPH06106369A | 1994-04-19 | |||
| JP2008264854A | 2008-11-06 | |||
| JP2004199956A | 2004-07-15 | |||
| JPH09216087A | 1997-08-19 |
Attorney, Agent or Firm:
EICHI Patent & Trademark Corp. et al. (JP)
Patent business corporation Wisdom international patent firm (JP)
Patent business corporation Wisdom international patent firm (JP)
Download PDF: