Title:
LASER SYSTEM, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/152805
Kind Code:
A1
Abstract:
In the laser system according to one aspect of the present disclosure, a random phase plate is disposed on an optical path between a solid state laser device and an excimer amplifier. In the random phase plate, cells having a prescribed shape, which are the smallest unit regions of a concave-convex pattern, are periodically arranged, and concave part regions or convex part regions are randomly arranged in cell units. The cells have an aspect ratio defined by d2/d1 of 1.2 or higher, where d1 represents the first-direction length of a cell and d2 represents the second-direction length of the cell, and where the first direction is the in-plane direction of the random phase plate corresponding to the V direction, the second direction is the in-plane direction of the random phase plate corresponding to the H direction, a Z direction is the beam travel direction of laser light entering the excimer amplifier, the V direction is the discharge direction, and the H direction is the direction orthogonal to the V direction and the Z direction.
Inventors:
TAMARU YUKI (JP)
MIURA TAISUKE (JP)
MIURA TAISUKE (JP)
Application Number:
PCT/JP2019/002058
Publication Date:
July 30, 2020
Filing Date:
January 23, 2019
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/10
Domestic Patent References:
| WO2017006418A1 | 2017-01-12 | |||
| WO2018138819A1 | 2018-08-02 |
Foreign References:
| JP2012204819A | 2012-10-22 | |||
| JP2015195216A | 2015-11-05 | |||
| JP2002343737A | 2002-11-29 | |||
| JP2007078979A | 2007-03-29 | |||
| US6442186B1 | 2002-08-27 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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