Title:
LEAK DETECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/088735
Kind Code:
A1
Abstract:
Provided is a leak detection apparatus, comprising: a test platform (100), the test platform (100) being used for holding a grinding head (101) placed for leak detection, the grinding head (101) being divided into one or a plurality of separate partitions, each partition correspondingly having a chamber, each chamber correspondingly having a ventilation hole (111); an upper cover (102), used for sealing the chamber, the upper cover (102) being located on the side of the chamber away from the test platform (100); a movable apparatus (103), the movable apparatus (103) being movable on a surface parallel to the test platform (100), and movable in a direction perpendicular to the test platform (100), and also suitable for applying pressure to the upper cover (102) so as to enable the upper cover (102) to seal the chamber.
Inventors:
HE JIAPING (CN)
KU CHINCHUNG (CN)
KU CHINCHUNG (CN)
Application Number:
PCT/CN2021/103870
Publication Date:
May 05, 2022
Filing Date:
June 30, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G01M3/26; B24B7/22; G01M3/04
Foreign References:
| US20040214513A1 | 2004-10-28 | |||
| CN110553803A | 2019-12-10 | |||
| CN109932133A | 2019-06-25 | |||
| CN104308736A | 2015-01-28 | |||
| CN207095970U | 2018-03-13 | |||
| CN105015923A | 2015-11-04 | |||
| CN204556179U | 2015-08-12 | |||
| CN211386333U | 2020-09-01 | |||
| CN103644290A | 2014-03-19 | |||
| CN204914342U | 2015-12-30 | |||
| JP2005080483A | 2005-03-24 | |||
| KR20160037395A | 2016-04-06 |
Attorney, Agent or Firm:
BOXIN CHINA INTELLECTUAL PROPERTY (CN)
Download PDF: