Title:
LIFT PIN AND VACUUM TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/102657
Kind Code:
A1
Abstract:
This lift pin to be in contact with a substrate having a surface to be treated and a surface not to be treated is provided with: a center member, which has a first surface having a first surface roughness and an electric insulating section, and a main body, i.e., a conductive member, and which faces the substrate surface not to be treated; and a peripheral member, which has a second surface having a second surface roughness that is smaller than the first surface roughness, and an electric insulating section, and which surrounds the periphery of the center member, said peripheral member facing the substrate surface not to be treated.
Inventors:
YAMAMOTO YOSHIAKI (JP)
JIMBO YOSUKE (JP)
MIYAYA TAKEHISA (JP)
ETO KENJI (JP)
ABE YOICHI (JP)
JIMBO YOSUKE (JP)
MIYAYA TAKEHISA (JP)
ETO KENJI (JP)
ABE YOICHI (JP)
Application Number:
PCT/JP2018/029408
Publication Date:
May 31, 2019
Filing Date:
August 06, 2018
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
H01L21/683; H01L21/3065; H01L21/31
Foreign References:
| JP2007208054A | 2007-08-16 | |||
| JP2003197721A | 2003-07-11 |
Attorney, Agent or Firm:
OIKAWA Shu et al. (JP)
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