Title:
LIGHT EMITTING DEVICE AND WAFER TESTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/176349
Kind Code:
A1
Abstract:
Some of the embodiments of the invention provide a light emitting device and a wafer testing device. The light emitting device comprises: an accommodation container having one end surface, a light processing structure, and a light source emitting test light to the light processing structure. The light processing structure comprises at least a first optical homogenizer for homogenizing the test light emitted by the light source, and the first optical homogenizer is mounted in the accommodation container. The light source is mounted on the end surface. The test light passes through the light processing structure and is then emitted to a wafer under test. According to the embodiments of the invention, the light emitting device can produce a light source with higher uniformity, the light emitting device is simple in structure, low in cost, and small in size, and is easily mounted on a wafer testing machine, and efficient multi-location parallel testing is facilitated.
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Inventors:
ZHANG MAN (CN)
WANG HUAGAO (CN)
WANG HUAGAO (CN)
Application Number:
PCT/CN2017/078890
Publication Date:
October 04, 2018
Filing Date:
March 30, 2017
Export Citation:
Assignee:
SHENZHEN HUIDING TECHNOLOGY CO (CN)
International Classes:
G01R31/26
Foreign References:
| CN103439539A | 2013-12-11 | |||
| CN103267938A | 2013-08-28 |
Attorney, Agent or Firm:
SHANGHAI CHENHAO INTELLECTUAL PROPERTY LAW FIRM GENERAL PARTNERSHIP (CN)
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