Title:
LIGHT IRRADIATION APPARATUS, MEASURING APPARATUS, OBSERVATION APPARATUS, AND FILM THICKNESS MEASURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/047945
Kind Code:
A1
Abstract:
This light irradiation apparatus comprises: a light source which emits light; a light pipe which receives light emitted from the light source and which uniformizes illuminance distribution of said light and outputs the resulting light; a diffuser plate which diffuses light outputted from the light pipe; and a light pipe which receives light diffused by the diffuser plate and which uniformizes illuminance distribution of said light and outputs the resulting light. In other words, the light irradiation apparatus comprises two light pipes and a diffuser plate interposed between said two light pipes.
Inventors:
NAKAMURA TOMONORI (JP)
TAKIMOTO SATOSHI (JP)
TAKIMOTO SATOSHI (JP)
Application Number:
PCT/JP2023/017271
Publication Date:
March 07, 2024
Filing Date:
May 08, 2023
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B21/06; G01B11/06
Domestic Patent References:
| WO2010061684A1 | 2010-06-03 |
Foreign References:
| JP2010156744A | 2010-07-15 | |||
| JP2009157325A | 2009-07-16 | |||
| JP2017044587A | 2017-03-02 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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