Title:
LIGHT IRRADIATION DEVICE, MEASUREMENT DEVICE, OBSERVATION DEVICE, AND FILM THICKNESS MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/047946
Kind Code:
A1
Abstract:
This light irradiation device comprises: a light source which emits light; a light pipe into which light emitted from the light source enters and which uniformizes the luminance distribution of the light and outputs the light; a diffusing part which diffuses the light output from the light pipe; and a light pipe into which the light diffused by the diffusion part enters and which uniformizes the luminance distribution of the light and outputs the light, wherein the diffusing part is a light diffusing surface provided on a light output surface of the light pipe.
Inventors:
NAKAMURA TOMONORI (JP)
TAKIMOTO SATOSHI (JP)
TAKIMOTO SATOSHI (JP)
Application Number:
PCT/JP2023/017308
Publication Date:
March 07, 2024
Filing Date:
May 08, 2023
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B21/06; G01B11/06
Domestic Patent References:
| WO2007013221A1 | 2007-02-01 | |||
| WO2019240300A1 | 2019-12-19 |
Foreign References:
| JP2017134992A | 2017-08-03 | |||
| JP2002122554A | 2002-04-26 | |||
| JP2017146496A | 2017-08-24 | |||
| JP2006030536A | 2006-02-02 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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