Title:
LIGHTING DEVICE, OBSERVATION DEVICE, AND OBSERVATION METHOD
Document Type and Number:
WIPO Patent Application WO/2015/118634
Kind Code:
A1
Abstract:
A lighting device wherein a sample is lighted by interference fringes, the device provided with: a light bundle generating unit that generates first and second light bundles from light that is emitted from a light source; a phase imparting unit that creates a phase difference between the first light bundle and the second light bundle; an interference optical system that interferes with the first light bundle and the second light bundle and generates interference fringes; and a drive control unit that drives the light bundle generating unit and the phase imparting unit and that alters the phase difference or the direction of the interference fringes or both.
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Inventors:
HATADA HITOSHI (JP)
OUCHI YUMIKO (JP)
OUCHI YUMIKO (JP)
Application Number:
PCT/JP2014/052690
Publication Date:
August 13, 2015
Filing Date:
February 05, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B21/06
Domestic Patent References:
| WO2009031418A1 | 2009-03-12 | |||
| WO2013001805A1 | 2013-01-03 | |||
| WO2011135819A1 | 2011-11-03 | |||
| WO2014017067A1 | 2014-01-30 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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