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Title:
LINEAR PLASMA GENERATOR FOR SELECTIVE SURFACE TREATMENT
Document Type and Number:
WIPO Patent Application WO/2017/135571
Kind Code:
A1
Abstract:
A dielectric barrier discharge device includes: a ground electrode which includes a depression extending in a first direction and is electrically grounded; a power electrode which is buried in the depression of the ground electrode, has a portion exposed to the outside, is applied with an AC voltage, and extends in the first direction; a dielectric barrier portion which is disposed in contact with the power electrode to cover the exposed portion of the power electrode and extends in the first direction; and a mask portion which extends in the first direction, is disposed in a first area in which a target object and the exposed portion of the power electrode face each other, and spatially controls a plasma density to selectively perform a plasma treatment on the target object according to a position of the first direction.

Inventors:
LIM YOUBONG (KR)
CHOE WONHO (KR)
Application Number:
PCT/KR2016/015255
Publication Date:
August 10, 2017
Filing Date:
December 26, 2016
Export Citation:
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Assignee:
PLASMAPP CO LTD (KR)
International Classes:
H05H1/24; H01J37/32; H05H1/46
Foreign References:
JP2002018276A2002-01-22
US20130206720A12013-08-15
US20060096539A12006-05-11
KR101030712B12011-04-26
JP2001087643A2001-04-03
Attorney, Agent or Firm:
NURY PATENT LAW FIRM (KR)
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