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Title:
LIQUID CARBON DIOXIDE SUPPLY DEVICE AND SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2013/115156
Kind Code:
A1
Abstract:
Provided are a liquid carbon dioxide supply device and supply method that are energy-saving and efficient. The liquid carbon dioxide supply device is provided with: a circulation system equipped with a purifying unit that removes impurities and contaminants from the carbon dioxide, a storage unit provided with a condenser for changing the gaseous carbon dioxide that has passed through the purifying unit into liquid carbon dioxide, a supply unit provided with a first pump for supplying the liquid carbon dioxide in the storage unit to a use point, and a return line that returns excess carbon dioxide, which is supplied from the supply unit but is not used at the use point, towards the storage unit; and a carbon dioxide-introducing unit for introducing carbon dioxide starting material or recovered gas to the circulation system. The carbon dioxide-introducing unit is provided with a second pump for increasing the pressure of the carbon dioxide and introducing said carbon dioxide into the circulation system.

Inventors:
SUGAWARA HIROSHI (JP)
ONO YOSHINORI (JP)
Application Number:
PCT/JP2013/051836
Publication Date:
August 08, 2013
Filing Date:
January 29, 2013
Export Citation:
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Assignee:
ORGANO CORP (JP)
SUGAWARA HIROSHI (JP)
ONO YOSHINORI (JP)
International Classes:
B01J3/02; B01D1/00; B08B7/00; C01B32/50; H01L21/304
Domestic Patent References:
WO2012157648A12012-11-22
Foreign References:
JP2005506694A2005-03-03
JP2006326429A2006-12-07
JP2012240876A2012-12-10
Attorney, Agent or Firm:
MIYAZAKI, Teruo et al. (JP)
Akio Miyazaki (JP)
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Claims: