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Patent Searching and Data


Title:
LIQUID FEEDING DEVICE AND LIQUID FEEDING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/192929
Kind Code:
A1
Abstract:
The present invention realizes a liquid feeding device capable of feeding liquid with high accuracy. The liquid feeding device comprises: a liquid feeding unit 104 having cylinders 205, 206 for performing solvent suction and discharge operations by sliding plungers 207, 208; a pressure sensor 217 that is disposed on the downstream side of the liquid feeding unit 104, and detects the pressure of a discharged solvent; switching valves 102a-102d for switching a plurality of solvents to be sucked and discharged; and a control unit 218 for controlling the operations of the liquid feeding unit 104 and the switching valves 102a-102d. The control unit 218 controls the operations of the switching valves 102a-102d in synchronization with the suction operations of the plungers 207, 208 so as to change the mixing ratio of the plurality of solvents, controls the plungers 207, 208 to operate at least at a first acceleration and a second acceleration different from each other, and reduces oscillation of the solvents sucked by the plungers 207, 208.

Inventors:
AKIEDA DAISUKE (JP)
TSUKADA NOBUHIRO (JP)
YOTA YUSUKE (JP)
HASHIMOTO YUICHIRO (JP)
MAEDA JUN (JP)
Application Number:
PCT/JP2021/008759
Publication Date:
September 30, 2021
Filing Date:
March 05, 2021
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
F04B49/06; F04B49/08; G01N30/32; G01N30/34
Domestic Patent References:
WO2016167174A12016-10-20
Foreign References:
JP5879280B22016-03-08
JP2002048072A2002-02-15
US20120198919A12012-08-09
JPS61234284A1986-10-18
JP2006292392A2006-10-26
JP5879280B22016-03-08
Other References:
See also references of EP 4130474A4
Attorney, Agent or Firm:
KAICHI IP (JP)
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