Title:
LIQUID SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/008169
Kind Code:
A1
Abstract:
This liquid supply device causes a tube diaphragm 15 serving as a first flexible member to expand to introduce a liquid into a pump chamber 16, and causes the tube diaphragm 15 to contract to discharge the liquid in the pump chamber 16 to the outside, the liquid supply device comprising: a medium accommodating case 28 provided with a bellows 31 serving as a second flexible member for partitioning a medium accommodating chamber 32 which communicates with a pump accommodating chamber 17, and an air chamber 33; a drive mechanism 27 provided with a rod 44a; an electric motor 46 serving as a driving member for causing the rod 44a to reciprocate in an axial direction; and a pressure regulating mechanism 60 for reducing the pressure in the air chamber 33 when the bellows 31 is to be contracted and the tube diaphragm 15 is expanded by a liquid medium M.
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WO/2002/008607 | PUMP WITH A BELLOWS SEAL |
JP4011210 | Chemical supply method and chemical supply device |
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Inventors:
MURAOKA HIROYUKI (JP)
Application Number:
PCT/JP2022/027304
Publication Date:
February 02, 2023
Filing Date:
July 11, 2022
Export Citation:
Assignee:
KOGANEI LTD (JP)
International Classes:
F04B43/107; F04B13/00; F04B43/02; F04B43/08
Foreign References:
JP2001221163A | 2001-08-17 | |||
JP2001140761A | 2001-05-22 | |||
JPH1137051A | 1999-02-09 | |||
JP2014001663A | 2014-01-09 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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