Title:
LOW-PRESSURE CHAMBER FOR SCANNING ELECTRON MICROSCOPY IN A WET ENVIRONMENT
Document Type and Number:
WIPO Patent Application WO2003104847
Kind Code:
A3
Abstract:
A specimen enclosure assembly (100) for use in an electron microscope and including a rigid specimen enclosure dish (102) having an aperture (122) and defining an enclosed specimen placement volume (125), an electron beam permeable, fluid impermeable, cover (114) sealing the specimen placement volume (125) at the aperture (122) from a volume outside the enclosure and a pressure controller communicating with the enclosed specimen placement volume (125) and being operative to maintain the enclosed specimen placement volume (125) at a pressure, which exceeds a vapor pressure of a liquid sample (123) in the specimen placement volume (125) and is greater than a pressure of a volume outside the enclosure, whereby a pressure differential across the cover (114) does not exceed a threshold level at which rupture of the cover (114)would occur.
Inventors:
MOSES ELISHA (IL)
THIBERGE STEPHAN (FR)
THIBERGE STEPHAN (FR)
Application Number:
PCT/IL2003/000455
Publication Date:
April 15, 2004
Filing Date:
June 01, 2003
Export Citation:
Assignee:
YEDA RES & DEV (IL)
MOSES ELISHA (IL)
THIBERGE STEPHAN (FR)
MOSES ELISHA (IL)
THIBERGE STEPHAN (FR)
International Classes:
G01N23/00; G21K7/00; G01N23/225; H01J37/00; H01J37/20; H01J37/252; H01J37/26; G02B; (IPC1-7): H01J37/00; H01J37/26; H01J37/252
Foreign References:
| US6130434A | 2000-10-10 | |||
| US4705949A | 1987-11-10 |
Other References:
See also references of EP 1509941A4
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