Title:
LOW VISCOSITY PRECURSOR COMPOSITIONS AND METHODS FOR THE DEPOSITION OF CONDUCTIVE ELECTRONIC FEATURES
Document Type and Number:
WIPO Patent Application WO2003032084
Kind Code:
A3
Abstract:
Abstract A precursor composition for the deposition and formation of an electrical feature such as a conductive feature. The precursor composition advantageously has a low viscosity enabling deposition using direct-write tools. The precursor composition also has a low conversion temperature, enabling the deposition and conversion to an electrical feature on low temperature substrates. A particularly preferred precursor composition includes silver metal for the formation of highly conductive silver features. Another particularly preferred precursor composition includes copper metal for the formation of highly conductive copper features.
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Inventors:
KODAS TOIVO T
HAMPDEN-SMITH MARK J
ATANASSOVA PAOLINA
KUNZE KLAUS
VANHEUSDEN KAREL
DENHAM HUGH
STUMP AARON
SCHULT ALLEN
HAMPDEN-SMITH MARK J
ATANASSOVA PAOLINA
KUNZE KLAUS
VANHEUSDEN KAREL
DENHAM HUGH
STUMP AARON
SCHULT ALLEN
Application Number:
PCT/US2002/031884
Publication Date:
August 21, 2003
Filing Date:
October 04, 2002
Export Citation:
Assignee:
SUPERIOR MICROPOWDERS LLC (US)
International Classes:
B05D3/02; B05D5/12; B22F9/30; B41M5/50; B41M5/00; B41M5/52; C09D11/00; C23C18/06; C23C18/08; C23C20/04; H01B1/02; H01L21/28; H01L21/288; H01L21/316; H01L21/3205; H05K1/16; H05K3/10; H01L21/314; H05K1/03; H05K1/09; H05K3/12; H05K3/40; (IPC1-7): C09D11/00; H05K1/09; H01B1/02; B05D5/06
Foreign References:
US6143356A | 2000-11-07 | |||
US6197366B1 | 2001-03-06 | |||
US4170480A | 1979-10-09 | |||
US4622069A | 1986-11-11 | |||
EP0696515A1 | 1996-02-14 | |||
JPS63278983A | 1988-11-16 | |||
JP2000011875A | 2000-01-14 |
Other References:
See also references of EP 1448725A4
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