Title:
MAGNETIC SENSOR AND METHOD FOR PRODUCING MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/137119
Kind Code:
A1
Abstract:
This magnetic sensor (1) is provided with: a non-magnetic substrate (10); and a sensing element (31) which is provided with a plurality of soft magnetic layers (105) (a lower soft magnetic layer (105a) and an upper soft magnetic layer (105b)) that are laminated on the substrate, and a conductor layer (106) that is arranged between the plurality of soft magnetic layers and has a high electrical conductivity in comparison to the soft magnetic layers, and which has a long-side direction and a short-side direction, while having uniaxial magnetic anisotropy in a direction that intersects with the long-side direction, and senses a magnetic field by means of a magnetic impedance effect.
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Inventors:
SHINO TATSUNORI (JP)
ENDO DAIZO (JP)
ENDO DAIZO (JP)
Application Number:
PCT/JP2019/041359
Publication Date:
July 02, 2020
Filing Date:
October 21, 2019
Export Citation:
Assignee:
SHOWA DENKO KK (JP)
International Classes:
G01R33/02; H01L43/00
Domestic Patent References:
| WO2008146610A1 | 2008-12-04 | |||
| WO2018230116A1 | 2018-12-20 |
Foreign References:
| JP2002176210A | 2002-06-21 | |||
| JP2002207069A | 2002-07-26 | |||
| JP2008249406A | 2008-10-16 | |||
| JP2003035757A | 2003-02-07 | |||
| US20100007343A1 | 2010-01-14 | |||
| JP2008197089A | 2008-08-28 |
Attorney, Agent or Firm:
FURUBE, Jiro et al. (JP)
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