Title:
MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2016/075763
Kind Code:
A1
Abstract:
The purpose of the disclosed invention is to provide a magnetic sensor that comprises a ferromagnetic thin film formed on a substrate and is capable of detecting a magnetic field in a direction perpendicular to the surface without significantly increasing the volume occupied by the magnetic sensor. A thin-film magnet that is magnetized in a direction perpendicular to the surface is formed on a magnetic resistance element via an insulator.
Inventors:
HASEGAWA HARUHIRO (JP)
Application Number:
PCT/JP2014/079903
Publication Date:
May 19, 2016
Filing Date:
November 12, 2014
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H01L43/08; G01R33/09; H01L43/10
Foreign References:
| JP2009020092A | 2009-01-29 | |||
| JP2004354182A | 2004-12-16 | |||
| JPH11316134A | 1999-11-16 | |||
| JP2000174358A | 2000-06-23 | |||
| JP2007517192A | 2007-06-28 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
Download PDF: