Title:
MAGNETISM DETECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/204135
Kind Code:
A1
Abstract:
[Problem] To provide a magnetism detection system which is capable of measuring magnetism over a wide range while using a reduced number of magnetic sensors. [Solution] A magnetism detection system 100 comprises: a shield box 200 which has magnetic shields S1-S3 that surround a measurement space 230; a magnetic sensor 40 which is fixed to the shield box 200 in the measurement space 230; a sample stage 300, at least part of which is inserted into the measurement space 230; and driving mechanisms 141-143 which change the relative positional relation of the sample stage 300 and the shield box 200. Thus, the relative positional relation of the sample stage 300 and the shield box 200 can be changed by the driving mechanisms 141-143, and it is therefore possible to measure magnetism over a wide range with one magnetic sensor 40 or a small number of magnetic sensors 40.
Inventors:
YAMAJI YUICHIRO (JP)
KASAJIMA TAMON (JP)
LIN CHENGBIN (JP)
KASAJIMA TAMON (JP)
LIN CHENGBIN (JP)
Application Number:
PCT/JP2023/015011
Publication Date:
October 26, 2023
Filing Date:
April 13, 2023
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01R33/02
Domestic Patent References:
| WO2018025829A1 | 2018-02-08 | |||
| WO2019239933A1 | 2019-12-19 |
Foreign References:
| JP2005257425A | 2005-09-22 | |||
| JP2017096714A | 2017-06-01 | |||
| JP2019219294A | 2019-12-26 | |||
| JP2007240349A | 2007-09-20 |
Attorney, Agent or Firm:
WASHIZU Mitsuhiro et al. (JP)
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