Title:
MANUFACTURING APPARATUS AND METHOD FOR MICROWAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/223589
Kind Code:
A1
Abstract:
A manufacturing apparatus for a microwave device. The manufacturing apparatus (1) for the microwave device comprises: a clamp (10), wherein the clamp (10) comprises a base (11) capable of rotating about a first axis (A1), and a bracket (12) capable of swinging about a second axis (A2), the bracket (12) is connected to the base (11) to hold an insulating substrate (40), and the first axis (A1) and the second axis (A2) intersect; a source (20) for releasing metal ions towards the insulating substrate (40); and a controller (30), wherein the controller (30) is coupled to the clamp (10) and the source (20), and is configured to control a motion pattern of the clamp (10) and/or an angle of the source (20), such that the insulating substrate (40) receives the metal ions from a plurality of angles, and a metal layer (50) is formed on a surface (41) of the insulating substrate (40). Further disclosed is a manufacturing method for a microwave device.
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Inventors:
YANG ZHIGANG (CN)
WANG ZHIJIAN (CN)
GUO JIULIN (CN)
WANG ZHIJIAN (CN)
GUO JIULIN (CN)
Application Number:
PCT/CN2021/088271
Publication Date:
November 11, 2021
Filing Date:
April 20, 2021
Export Citation:
Assignee:
RICHVIEW ELECTRONICS CO LTD (CN)
International Classes:
C23C14/50; C23C14/35; C23C14/48
Foreign References:
| US20090258151A1 | 2009-10-15 | |||
| CN109652780A | 2019-04-19 | |||
| CN1500284A | 2004-05-26 | |||
| EP0863226A1 | 1998-09-09 | |||
| US20040065262A1 | 2004-04-08 | |||
| US20150307986A1 | 2015-10-29 | |||
| US5759282A | 1998-06-02 | |||
| US3746571A | 1973-07-17 | |||
| CN102312203A | 2012-01-11 |
Attorney, Agent or Firm:
CHINA PATENT AGENT (HK) LTD. (CN)
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