Title:
MASK AND METHOD FOR MANUFACTURING MASK, AND MOTHER PLATE
Document Type and Number:
WIPO Patent Application WO/2019/009526
Kind Code:
A1
Abstract:
The present invention relates to a mask and a method for manufacturing a mask, and a mother plate and a method for manufacturing a mother plate. A mask (100) according to the present invention, which is manufactured by electroforming, comprises a mask body and a plurality of mask patterns (PP), wherein the mask body comprises a plurality of masking cells (110) and a center part (111) of each of the masking cells (110) has a greater thickness than an edge part (115) of each of the masking cells (111).
Inventors:
JEON JIN WAN (KR)
SHIN IL KWON (KR)
LEE YOO JIN (KR)
SHIN IL KWON (KR)
LEE YOO JIN (KR)
Application Number:
PCT/KR2018/006457
Publication Date:
January 10, 2019
Filing Date:
June 07, 2018
Export Citation:
Assignee:
TGO TECH CORP (KR)
International Classes:
C25D1/00; C25D1/10; C25D1/20; H01L21/033; H01L21/288; H01L21/308; H01L51/00
Foreign References:
| JP2005154879A | 2005-06-16 | |||
| JP2009167523A | 2009-07-30 | |||
| US3878061A | 1975-04-15 | |||
| JP2014218747A | 2014-11-20 | |||
| JP2010065297A | 2010-03-25 |
Attorney, Agent or Firm:
KIM, Han (KR)
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