Title:
MASK PLATE AND METHOD FOR PERFORMING EVAPORATION BY USING SAME
Document Type and Number:
WIPO Patent Application WO/2021/218411
Kind Code:
A1
Abstract:
Provided are a mask plate and a method for performing evaporation by using same. The mask plate comprises a mask plate body that comprises a plurality of through holes distributed at intervals, including main holes and extension holes communicated with the main holes; each main hole is used for enabling an evaporation material to penetrate to form a pixel pattern; each extension hole is used for enabling the evaporation material to penetrate to form a connection pattern of the pixel pattern; two adjacent through holes arranged along a preset direction have one-to-one correspondence to two pixel patterns that are arranged at intervals along the preset direction and are needed to be formed on a substrate to be evaporated; and on the mask plate body, a minimum distance between the two adjacent through holes arranged along the preset direction is greater than or equal to the size of the pixel pattern in the preset direction, and is less than or equal to the maximum size of the through holes in the preset direction. The mask plate may be used for forming the pixel pattern and the connection pattern of the pixel pattern on the substrate to be evaporated, thereby being capable of solving the problems in the prior art that a process is complex and an evaporation time is wasted when using the mask plate to perform patterned material evaporation.
Inventors:
LI QIAN (CN)
ZENG JIA (CN)
ZENG JIA (CN)
Application Number:
PCT/CN2021/079861
Publication Date:
November 04, 2021
Filing Date:
March 10, 2021
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
CHENGDU BOE OPTOELECT TECH CO (CN)
CHENGDU BOE OPTOELECT TECH CO (CN)
International Classes:
C23C14/04; C23C14/12; C23C14/24
Foreign References:
| CN111441013A | 2020-07-24 | |||
| CN110611054A | 2019-12-24 | |||
| CN103187432A | 2013-07-03 | |||
| CN108866476A | 2018-11-23 | |||
| CN110257769A | 2019-09-20 | |||
| JPH1050478A | 1998-02-20 |
Attorney, Agent or Firm:
DRAGON INTELLECTUAL PROPERTY LAW FIRM (CN)
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