Title:
MASK PLATE ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2021/218412
Kind Code:
A1
Abstract:
The present disclosure relates to a mask plate assembly comprising a first mask plate and a plurality of first mask strips having different effective evaporation patterns. The first mask plate comprises a first frame and a first support strip which is arranged between a group of side frames opposite to the first frame. A first hollow portion having multiple first through holes is arranged on a first region of the first support strip, the multiple first through holes being used in conjunction with the plurality of first mask strips to form different first functional structures by means of evaporation.
Inventors:
HE PANTING (CN)
XIAO LEIFANG (CN)
XIAO LEIFANG (CN)
Application Number:
PCT/CN2021/079862
Publication Date:
November 04, 2021
Filing Date:
March 10, 2021
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
CHENGDU BOE OPTOELECT TECH CO (CN)
CHENGDU BOE OPTOELECT TECH CO (CN)
International Classes:
C23C14/04; C23C14/12; C23C14/24
Foreign References:
| CN212025440U | 2020-11-27 | |||
| CN108977762A | 2018-12-11 | |||
| CN108893710A | 2018-11-27 | |||
| CN110029322A | 2019-07-19 | |||
| CN110066975A | 2019-07-30 | |||
| JP2000039514A | 2000-02-08 |
Attorney, Agent or Firm:
DRAGON INTELLECTUAL PROPERTY LAW FIRM (CN)
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