Title:
MASS FLOW CONTROLLER SYSTEM
Document Type and Number:
WIPO Patent Application WO/2011/078242
Kind Code:
A1
Abstract:
Disclosed is a mass flow controller system which makes it possible to precisely control an output flow rate by means of a mass flow controller. In the mass flow controller system, data giving information about the relationship between flow rate values of a reference gas and CF values of a sample gas are stored; a target flow rate is converted into a reference gas flow rate using a predetermined CF value; a sample gas flow rate is calculated from the converted reference gas flow rate and the CF value corresponding to the reference gas flow rate; the sample gas flow rate is compared with the target flow rate; and the CF value used for the reference gas flow rate conversion or the sample gas flow rate calculation is updated using the corresponding relationship therebetween.
Inventors:
TAKEUCHI HIROYUKI (JP)
YONEDA YUTAKA (JP)
ISOBE YASUHIRO (JP)
YONEDA YUTAKA (JP)
ISOBE YASUHIRO (JP)
Application Number:
PCT/JP2010/073172
Publication Date:
June 30, 2011
Filing Date:
December 22, 2010
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
TAKEUCHI HIROYUKI (JP)
YONEDA YUTAKA (JP)
ISOBE YASUHIRO (JP)
TAKEUCHI HIROYUKI (JP)
YONEDA YUTAKA (JP)
ISOBE YASUHIRO (JP)
International Classes:
G05D7/06; G01F1/00
Foreign References:
| JP2001264138A | 2001-09-26 | |||
| JPH11265218A | 1999-09-28 | |||
| JPH0641759A | 1994-02-15 | |||
| JPH1183732A | 1999-03-26 |
Other References:
See also references of EP 2518581A4
Attorney, Agent or Firm:
NISHIMURA, RYUHEI (JP)
Ryuhei Nishimura (JP)
Ryuhei Nishimura (JP)
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