Title:
MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND CHARACTERISTIC MEASUREMENT UNIT
Document Type and Number:
WIPO Patent Application WO/2007/080790
Kind Code:
A1
Abstract:
A measurement apparatus comprises an optical intensity information acquirer
(40) for acquiring optical intensity information on a measured light containing
a given band component and modulated by both an optical element included in an
optical system (10) and a measured object (sample (100)), and an arithmetic processor
(50) for calculating at least one of the matrix elements of a Mueller matrix representing
the optical characteristic of the measured object according to the optical intensity
information on the measured light and a theoretical formula of the optical intensity
of the measured light. The optical intensity information acquirer (40) acquires
optical intensity information on a plurality of measured lights obtained in
the optical system (10), at least one optical element of which has a major-axis
orientation different from the others. The arithmetic processor (50) performs
a carrier amplitude coefficient calculation and a matrix element calculation
for calculating at least one matrix element according to a carrier amplitude
coefficient and a theoretical formula of the carrier amplitude coefficient
containing at least one matrix element.
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Inventors:
OTANI YUKITOSHI (JP)
OKA KAZUHIKO
WAKAYAMA TOSHITAKA (JP)
TANIGUCHI ATSUSHI
OKA KAZUHIKO
WAKAYAMA TOSHITAKA (JP)
TANIGUCHI ATSUSHI
Application Number:
PCT/JP2006/326056
Publication Date:
July 19, 2007
Filing Date:
December 27, 2006
Export Citation:
Assignee:
UNIV TOKYO NAT UNIV CORP (JP)
UNIV HOKKAIDO NAT UNIV CORP (JP)
OTANI YUKITOSHI (JP)
OKA KAZUHIKO
WAKAYAMA TOSHITAKA (JP)
TANIGUCHI ATSUSHI
UNIV HOKKAIDO NAT UNIV CORP (JP)
OTANI YUKITOSHI (JP)
OKA KAZUHIKO
WAKAYAMA TOSHITAKA (JP)
TANIGUCHI ATSUSHI
International Classes:
G01J4/04; G01N21/21
Domestic Patent References:
| WO2006103953A1 | 2006-10-05 |
Foreign References:
| JP2006308550A | 2006-11-09 |
Other References:
OKABE H. ET AL.: "New configuration of channeled spectro polarimeter for snapshot polarimetric measurement of materials", PROCEEDINGS OF SPIE, vol. 5878, 31 August 2005 (2005-08-31), pages 1 - 8, XP002390056
WAKAYAMA T. ET AL.: "Real-time measurement for birefringence dispersion using double retarder", PROCEEDINGS OF SPIE, vol. 5888, 2 September 2005 (2005-09-02), XP003016021
EBISAWA M. ET AL.: "Mueller matrix polarimeter by phase shifting method", UEXTENDED ABSTRACTS (THE 53RD SPRING MEETING, 2006); THE JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES], no. 3, 22 March 2006 (2006-03-22), pages 109, XP003016465
WAKAYAMA T. ET AL.: "Real-time measurement for birefringence dispersion using double retarder", PROCEEDINGS OF SPIE, vol. 5888, 2 September 2005 (2005-09-02), XP003016021
EBISAWA M. ET AL.: "Mueller matrix polarimeter by phase shifting method", UEXTENDED ABSTRACTS (THE 53RD SPRING MEETING, 2006); THE JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES], no. 3, 22 March 2006 (2006-03-22), pages 109, XP003016465
Attorney, Agent or Firm:
OFUCHI, Michie et al. (Ogikubo TM Bldg. 26-13, Ogikubo 5-chom, Suginami-ku Tokyo 51, JP)
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