Title:
MEASUREMENT PROCESSING DEVICE, X-RAY INSPECTION DEVICE, MEASUREMENT PROCESSING METHOD, MEASUREMENT PROCESSING PROGRAM, AND STRUCTURE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/139756
Kind Code:
A1
Abstract:
The present invention is a measurement processing device for use in an X-ray inspection device, such measurement processing device being provided with the following: a region information acquisition unit that acquires first region information based on X-rays transmitted through a first region which is part of a first object for inspection; a storage unit that stores second region information relating to a second region of a second object for inspection which is larger than the first region; and a determination unit that determines, on the basis of the first region information and the second region information, whether a region corresponding to the first region is included in the second region.
Inventors:
YASHIMA HIROTOMO (JP)
HAYANO FUMINORI (JP)
KAWAI AKITOSHI (JP)
HAYANO FUMINORI (JP)
KAWAI AKITOSHI (JP)
Application Number:
PCT/JP2015/056251
Publication Date:
September 09, 2016
Filing Date:
March 03, 2015
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01N23/04
Foreign References:
| JPH1130595A | 1999-02-02 | |||
| JPH0851131A | 1996-02-20 |
Other References:
See also references of EP 3267183A4
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
Fuyuki Nagai (JP)
Fuyuki Nagai (JP)
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