Title:
MEASURING DEVICE, ROBOT SYSTEM, MEASURING METHOD, ARTICLE MANUFACTURING METHOD, AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2023/238736
Kind Code:
A1
Abstract:
This measuring device is capable of reducing an imaging time when exposure and imaging signal readout are performed in line sequence, and comprises: an imaging means which comprises a plurality of photoelectric conversion elements arranged in a line, and in which exposure and imaging signal readout are performed in line sequence; an illuminating means for projecting a plurality of pattern lights onto a measurement target object; and a control means whereby the measurement target object is sequentially illuminated with the plurality of pattern lights or with ambient light during a period in which exposure and imaging signal readout are being performed in line sequence by the imaging means for each one image, the control means performing measurement of the measurement target object on the basis of a plurality of images obtained consecutively from the imaging means.
Inventors:
KIRIYAMA TOMOYA (JP)
Application Number:
PCT/JP2023/020075
Publication Date:
December 14, 2023
Filing Date:
May 30, 2023
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
G01C3/06; G01B11/245; G01B11/25
Domestic Patent References:
| WO2019159817A1 | 2019-08-22 |
Foreign References:
| JP2019191321A | 2019-10-31 | |||
| JP2018116032A | 2018-07-26 |
Attorney, Agent or Firm:
TAKAOKA, Ryoichi et al. (JP)
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