Title:
MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN LAYERS
Document Type and Number:
WIPO Patent Application WO/2012/160131
Kind Code:
A1
Abstract:
The invention relates to a measuring probe for measuring the thickness of thin layers, comprising a housing (14) and at least one sensor element (17) which is accommodated so as to be at least slightly movable along a longitudinal axis (16) and which comprises at least one first coil device (44) that includes a magnetic cup-type core (41) arranged along the longitudinal axis (16) of the housing (14). A first and a second coil (70, 71) are associated with the central pin (42) of the sensor element (17). The measuring probe further comprises a spherical positioning cap (21) which points in the direction of the surface to be measured of a device under test and has a contact surface (57) to be positioned on a surface to be measured. A second coil device (48) that is formed of a disk-shaped or ring-shaped support (49) having at least one Archimedean coil (51) is associated with the spherical positioning cap (21). Furthermore, a shield (83, 85) is provided at least in part between the first and the second coil device (44, 48).
Inventors:
FISCHER HELMUT (CH)
Application Number:
PCT/EP2012/059690
Publication Date:
November 29, 2012
Filing Date:
May 24, 2012
Export Citation:
Assignee:
HELMUT FISCHER GMBH INST FUER ELEKTRONIK UND MESSTECHNIK (DE)
FISCHER HELMUT (CH)
FISCHER HELMUT (CH)
International Classes:
G01N27/90; G01B7/06
Domestic Patent References:
| WO2010044670A2 | 2010-04-22 |
Foreign References:
| US5886522A | 1999-03-23 | |||
| US3855561A | 1974-12-17 | |||
| US4618825A | 1986-10-21 | |||
| DE102005054593A1 | 2007-05-16 |
Attorney, Agent or Firm:
PATENTANWÄLTE MAMMEL UND MASER (DE)
Download PDF:
Claims: