Title:
MEMORY-CELL ARRAY, NONVOLATILE STORAGE DEVICE, MEMORY-CELL, AND MANUFACTURING METHOD OF MEMORY-CELL ARRAY
Document Type and Number:
WIPO Patent Application WO/2010/137339
Kind Code:
A1
Abstract:
A manufacturing method of memory-cell arrays, wherein multiple first conductor layers (2) and multiple second conductor layers (14) are provided in extension so as to three-dimensionally intersect with each other, on a semiconductor substrate (1); and memory-cells, consisting of a current-control device (10) and a variable-resistance device (23) electrically-connected serially, are provided in prescribed arrangement at each of the three-dimensionally intersecting sections of the multiple first conductor layers (2) and multiple second conductor layers (14). The manufacturing method of memory-cell arrays comprises; a process for forming first interlayer insulator-films (3); a process for forming contact holes through the first interlayer insulator-films (3); a process for accumulating a first-plug material (4) within aforementioned contact holes, and also on aforementioned first interlayer insulator-films (3); a first polishing process in which the first-plug material (4) is polished until the first interlayer insulator-film (3) becomes exposed; a process in which conductor films (6a) that will become first electrodes (6) of the current-control devices (10) are accumulated on the first-plug material (4) and the first interlayer insulator-films (3), after the first polishing process; and a second polishing process in which the surfaces of the conductor films (6a) are polished.
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Inventors:
OKADA TAKASHI
MIKAWA TAKUMI
ARITA KOJI
MIKAWA TAKUMI
ARITA KOJI
Application Number:
PCT/JP2010/003597
Publication Date:
December 02, 2010
Filing Date:
May 28, 2010
Export Citation:
Assignee:
PANASONIC CORP (JP)
OKADA TAKASHI
MIKAWA TAKUMI
ARITA KOJI
OKADA TAKASHI
MIKAWA TAKUMI
ARITA KOJI
International Classes:
H01L27/10; H01L45/00; H01L49/00
Domestic Patent References:
| WO2008062734A1 | 2008-05-29 | |||
| WO2008047530A1 | 2008-04-24 | |||
| WO2008104462A1 | 2008-09-04 |
Foreign References:
| JP2008118022A | 2008-05-22 |
Attorney, Agent or Firm:
NII, Hiromori (JP)
New house extensive 守 (JP)
New house extensive 守 (JP)
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