Title:
MEMS ACCELEROMETER AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2020/080592
Kind Code:
A1
Abstract:
In order to form a distance between MEMS electrodes to be d or lower, by using a process of manufacturing an MEMS structure, whose minimum line width is limited to d, at a silicon foundry, the present invention may provide an MEMS accelerometer comprising: a proof mass floating and moving in the horizontal direction, and including a plurality of first electrodes extending by a predetermined length in a direction perpendicular to the moving direction; a first elastic body for elastically supporting opposite ends of the proof mass; a fixed electrode including a plurality of second electrodes extending by a predetermined length toward the proof mass; and a movable electrode disposed between the proof mass and the fixed electrode and including third electrodes disposed to overlap the first electrodes and the second electrodes positioned in opposite sides thereof, respectively, wherein the movable electrode floats and moves in the horizontal direction such that the third electrodes are attached to the second electrodes to reduce a distance between the first electrodes and the third electrodes.
Inventors:
KOH YUL (KR)
LEE SANGCHUL (KR)
KANG BYEONGGEUN (KR)
LEE SUNGDAN (KR)
LEE SANGCHUL (KR)
KANG BYEONGGEUN (KR)
LEE SUNGDAN (KR)
Application Number:
PCT/KR2018/013976
Publication Date:
April 23, 2020
Filing Date:
November 15, 2018
Export Citation:
Assignee:
LG ELECTRONICS INC (KR)
International Classes:
B81B7/02; B81B3/00; B81C1/00
Foreign References:
| JP2011196966A | 2011-10-06 | |||
| CN101481084A | 2009-07-15 | |||
| JP2011237403A | 2011-11-24 | |||
| US20160069928A1 | 2016-03-10 | |||
| US20060283246A1 | 2006-12-21 |
Attorney, Agent or Firm:
KBK & ASSOCIATES (KR)
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