MEMS-BASED 3D ION TRAPPING DEVICE FOR USING LASER PENETRATING ION TRAPPING STRUCTURE, AND METHOD FOR MANUFACTURING SAME

Title:

MEMS-BASED 3D ION TRAPPING DEVICE FOR USING LASER PENETRATING ION TRAPPING STRUCTURE, AND METHOD FOR MANUFACTURING SAME

Document Type and Number:

WIPO Patent Application WO/2016/068649

Kind Code:

A1

Abstract:

One embodiment of the present invention provides an ion trapping device and a method for manufacturing same, the ion trapping device comprising, on top or underneath a substrate: a first RF electrode rail; a second RF electrode rail; at least one first DC electrode; and at least one second DC electrode, wherein the substrate forms an ion trapping area in an isolated space of which one side and the other side in the widthwise direction of the ion trapping device are separated at a specific distance, the first RF electrode rail and the second RF electrode device are arranged adjacent to each other in the lengthwise direction of the ion trapping device, wherein the first RF electrode rail is positioned on top of the one side, the at least one second DC electrode is positioned underneath the one side, the at least one first DC electrode is positioned on top of the other side, and the second RF electrode rail is positioned underneath the other side, and wherein the ion trapping device is provided with a laser penetration passage which is connected from an outer side surface of one side or the other side of the substrate to the trapping area.

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Inventors:

KIM TAEHYUN (KR)
CHO DONGIL (KR)
LEE MINJAE (KR)
HONG SEOKJUN (KR)
CHEON HONGJIN (KR)

Application Number:

PCT/KR2015/011583

Publication Date:

May 06, 2016

Filing Date:

October 30, 2015

Export Citation:

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Assignee:

SK TELECOM CO LTD (KR)
UNIV SEOUL NAT R & DB FOUND (KR)

International Classes:

G06N99/00; H04B10/70; H04L9/12

Foreign References:

US7928375B1	2011-04-19
US20100084549A1	2010-04-08
US20060169882A1	2006-08-03
US20050061767A1	2005-03-24

Other References:

PATRICK SEE ET AL.: "Fabrication of a Monolithic Array of Three Dimensional Si-based Ion Traps", MICROELECTROMECHANICAL SYSTEMS JOURNAL, vol. 22, no. 5, 3 July 2013 (2013-07-03), pages 1180 - 1189, XP011528329, Retrieved from the Internet

Attorney, Agent or Firm:

LEE, CHULHEE (KR)
이철희 (KR)

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