Title:
MEMS CAPACITIVE MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2020/045843
Kind Code:
A1
Abstract:
By attaching a support plate to a support and forming an anchor supporting a diaphragm at the edge region of the support plate, a MEMS capacitive microphone of the present invention is capable of being realized as a microphone having excellent sensitivity and an excellent signal-to-noise ratio. In the MEMS capacitive microphone of the present invention, a support plate (120) from which the interior is removed in a plan view is attached to a support (110) having an end fixed to a substrate (100), an anchor (130) is attached to the edge region of the support plate (120), the edge of a diaphragm (200) is supported by the anchor (130), "the region from which the substrate is removed" in a plan view includes the anchor (130), a plurality of movable comb fingers (300) and a plurality of stiffeners are attached to the upper portion, the lower portion, or the upper and lower portions of the diaphragm (200), and fixed comb fingers (400) which are arranged at both sides of the movable comb fingers (300) at predetermined intervals in a plan view are supported by the support (110).
Inventors:
KIM KYEONG WON (KR)
LEE TAE JOON (KR)
LEE TAE JOON (KR)
Application Number:
PCT/KR2019/009751
Publication Date:
March 05, 2020
Filing Date:
August 05, 2019
Export Citation:
Assignee:
KIM KYEONG WON (KR)
International Classes:
H04R19/00; H04R19/04
Foreign References:
| KR20080090555A | 2008-10-08 | |||
| KR20150047046A | 2015-05-04 | |||
| KR20170140608A | 2017-12-21 | |||
| KR20110120209A | 2011-11-03 | |||
| US20140197502A1 | 2014-07-17 |
Attorney, Agent or Firm:
HAN, Seong Geun (KR)
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